Issued Patents All Time
Showing 51–71 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6673637 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Dan Wack, Ady Levy, Kyle Brown, Gary Bultman, John Fielden | 2004-01-06 |
| 6671051 | Apparatus and methods for detecting killer particles during chemical mechanical polishing | Anantha R. Sethuraman, Guoheng Zhao | 2003-12-30 |
| 6636302 | Scanning system for inspecting anamolies on surfaces | Stanley Stokowski | 2003-10-21 |
| 6633831 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2003-10-14 |
| 6628397 | Apparatus and methods for performing self-clearing optical measurements | Shing Lee, Kalman Kele, Guoheng Zhao, Kurt Lehman | 2003-09-30 |
| 6611330 | System for measuring polarimetric spectrum and other properties of a sample | Shing Lee, Haiming Wang, Adam E. Norton | 2003-08-26 |
| 6552803 | Detection of film thickness through induced acoustic pulse-echos | Haiming Wang, Shing Lee | 2003-04-22 |
| 6411390 | Interferometric system for measurement disturbance of a sample | John Jiang | 2002-06-25 |
| 6268916 | System for non-destructive measurement of samples | Shing Lee, Xing Chen | 2001-07-31 |
| 6215551 | Scanning system for inspecting anomalies on surfaces | Stanley Stokowski | 2001-04-10 |
| 6184984 | System for measuring polarimetric spectrum and other properties of a sample | Shing Lee, Haiming Wang, Adam E. Norton | 2001-02-06 |
| 6108087 | Non-contact system for measuring film thickness | Shing Lee, Haiming Wang | 2000-08-22 |
| 6081325 | Optical scanning system for surface inspection | Brian C. Leslie, Keith Wells | 2000-06-27 |
| 5883710 | Scanning system for inspecting anomalies on surfaces | Stanley Stokowski | 1999-03-16 |
| 5864394 | Surface inspection system | John R. Jordan, Keith Wells | 1999-01-26 |
| 5825482 | Surface inspection system with misregistration error correction and adaptive illumination | Charles E. Wayman | 1998-10-20 |
| 5633747 | Variable spot-size scanning apparatus | — | 1997-05-27 |
| 5576831 | Wafer alignment sensor | James A. Tebelskis | 1996-11-19 |
| 5530550 | Optical wafer positioning system | Philip R. Rigg, Keith Wells, David S. Calhoun | 1996-06-25 |
| 5224482 | Ultrasound high velocity flow correlation measurement using coded pulses | Erlvada A. Sivers | 1993-07-06 |
| 4852575 | Ultrasound flow measurement apparatus | — | 1989-08-01 |