Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148593 | Ion beam device | Shinichi Matsubara | 2024-11-19 |
| 11713963 | Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method | Atsuko Shintani, Takahiro Kawasaki, Kazuhisa Hasumi, Hiroki Kawada | 2023-08-01 |
| 11430106 | Image processing device, image processing method and charged particle microscope | Takeyoshi Ohashi, Atsuko Shintani, Kazuhisa Hasumi | 2022-08-30 |
| 10943762 | Inspection system, image processing device and inspection method | Takeyoshi Ohashi | 2021-03-09 |
| 10672119 | Inspection device | Atsuko Yamaguchi, Kazuhisa Hasumi | 2020-06-02 |
| 10295339 | Pattern measurement method and measurement apparatus | Kazuhisa Hasumi | 2019-05-21 |
| 9831062 | Method for pattern measurement, method for setting device parameters of charged particle radiation device, and charged particle radiation device | Makoto Suzuki, Satoru Yamaguchi, Kei Sakai, Miki Isawa, Satoshi Takada +1 more | 2017-11-28 |
| 9823065 | Surface measurement apparatus | Takanori Kondo, Takahiro Jingu, Masaaki Ito | 2017-11-21 |
| 8358406 | Defect inspection method and defect inspection system | Tomohiro Funakoshi, Shigeaki Hijikata | 2013-01-22 |
| 6757621 | Process management system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa +12 more | 2004-06-29 |
| 6661912 | Inspecting method and apparatus for repeated micro-miniature patterns | Junichi Taguchi, Aritoshi Sugimoto, Yuko Inoue, Tetsuya Watanabe, Wakana Shinke | 2003-12-09 |
| 6542830 | Process control system | Fumio Mizuno, Seiji Isogai, Kenji Watanabe, Yasuhiro Yoshitake, Terushige Asakawa +12 more | 2003-04-01 |
| 6365425 | Method of manufacturing semiconductor device | Aritoshi Sugimoto, Hisato Nakamura | 2002-04-02 |