Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Sang Ki Nam, Jim Rogers +6 more | 2023-02-28 |
| 10622195 | Multi zone gas injection upper electrode system | Ryan Bise, Rajinder Dhindsa, Alexei Marakhtanov, Sang Ki Nam, Jim Rogers +6 more | 2020-04-14 |
| 9263240 | Dual zone temperature control of upper electrodes | Alexei Marakhtanov, Rajinder Dhindsa, Ryan Bise, Sang Ki Nam, Jim Rogers +5 more | 2016-02-16 |
| 9111724 | Apparatus and method for controlling plasma potential | Douglas Keil, Reza Sadjadi, Eric A. Hudson, Eric H. Lenz, Rajinder Dhindsa | 2015-08-18 |
| 8961145 | Air compressor with shut-off mechanism | Sean D. Hill | 2015-02-24 |
| 8674255 | Apparatus and method for controlling etch uniformity | Eric H. Lenz, Raj Dhindsa, Dave Trussell | 2014-03-18 |
| 8393873 | Air compressor with shut-off mechanism | Sean D. Hill | 2013-03-12 |
| 8299390 | Apparatus and method for controlling plasma density profile | Rajinder Dhindsa, Felix Kozakevich, Dave Trussell | 2012-10-30 |
| 8114246 | Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same | Tuqiang Ni, Wenli Collison, David Hemker | 2012-02-14 |
| 8080760 | Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor | Rajinder Dhindsa, Eric H. Lenz, Andy W. DeSepte | 2011-12-20 |
| 8000082 | Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same | Rajinder Dhindsa, Eric H. Lenz, Felix Kozakevich | 2011-08-16 |
| 7977242 | Double mask self-aligned double patterning technology (SADPT) process | S. M. Reza Sadjadi, Andrew R. Romano | 2011-07-12 |
| 7977390 | Method for plasma etching performance enhancement | Bing Ji, Erik A. Edelberg, Takumi Yanagawa, Zhisong Huang | 2011-07-12 |
| 7874807 | Air compressor with shut-off mechanism | Sean D. Hill | 2011-01-25 |
| 7838086 | Magnetic enhancement for mechanical confinement of plasma | Douglas Keil, Eric A. Hudson, Reza Sadjadi, Eric H. Lenz, Rajinder Dhindsa +1 more | 2010-11-23 |
| 7749353 | High aspect ratio etch using modulation of RF powers of various frequencies | Camelia Rusu, Rajinder Dhindsa, Eric A. Hudson, Mukund Srinivasan, Felix Kozakevich | 2010-07-06 |
| 7732728 | Apparatuses for adjusting electrode gap in capacitively-coupled RF plasma reactor | Rajinder Dhindsa, Eric H. Lenz, Andy W. DeSepte | 2010-06-08 |
| 7683289 | Apparatus and method for controlling plasma density profile | Rajinder Dhindsa, Felix Kozakevich, Dave Trussell | 2010-03-23 |
| 7632375 | Electrically enhancing the confinement of plasma | Andras Kuthi, Jisoo Kim, Eric H. Lenz, Rajindar Dhindsa, Reza Sadjadi | 2009-12-15 |
| 7525787 | Electrostatic chuck assembly with dielectric material and/or cavity having varying thickness, profile and/or shape, method of use and apparatus incorporating same | Rajinder Dhindsa, Eric H. Lenz, Felix Kozakevich | 2009-04-28 |
| 7455748 | Magnetic enhancement for mechanical confinement of plasma | Douglas Keil, Eric A. Hudson, Reza Sadjadi, Eric H. Lenz, Rajinder Dhindsa +1 more | 2008-11-25 |
| 7405521 | Multiple frequency plasma processor method and apparatus | Raj Dhindsa, S. M. Reza Sadjadi, Felix Kozakevich, Dave Trussell, Eric H. Lenz +5 more | 2008-07-29 |
| 7169695 | Method for forming a dual damascene structure | Zhisong Huang, Reza Sadjadi | 2007-01-30 |
| 7144521 | High aspect ratio etch using modulation of RF powers of various frequencies | Camelia Rusu, Rajinder Dhindsa, Eric A. Hudson, Mukund Srinivasan, Felix Kozakevich | 2006-12-05 |
| 7105102 | Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same | Tuqiang Ni, Wenli Collison, David Hemker | 2006-09-12 |