Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230521 | Method for non-contact low substrate temperature measurement | Kim Vellore, Matthew D. Scotney-Castle | 2025-02-18 |
| 10948353 | Thermal processing chamber with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Michael S. Liu, Dongming Iu +2 more | 2021-03-16 |
| 10571337 | Thermal cooling member with low temperature control | Lara Hawrylchak, Samuel C. Howells, Wolfgang Aderhold, Michael S. Liu, Dongming Iu +2 more | 2020-02-25 |
| 10109514 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Norman L. Tam +2 more | 2018-10-23 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Schubert S. Chu, Shay Assaf, Kim Vellore, Zhepeng CONG | 2018-05-01 |
| 9735034 | Visual feedback for process control in RTP chambers | Kim Vellore, Dinesh Kanawade, Stephen Moffatt, Aaron Miller, Norman L. Tam +2 more | 2017-08-15 |
| 8829393 | Scanned laser light source | Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien +1 more | 2014-09-09 |
| 8692151 | Laser beam positioning system | Krishna Kumar Kuttannair, Aaron Muir Hunter, Stephen Moffatt | 2014-04-08 |
| 8503497 | Protection device for solid state laser | Oleg V. Serebryanov, Alexander Goldin, Abhilash J. Mayur | 2013-08-06 |
| 8288685 | Thermal flux processing by scanning a focused line beam | Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien +1 more | 2012-10-16 |
| 8178819 | Thermal flux processing by scanning a focused line beam | Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien +1 more | 2012-05-15 |
| 7904821 | Graphical user interface that is convertible at runtime | Andrei Ivanov | 2011-03-08 |
| 7875829 | Thermal flux processing by scanning a focused line beam | Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien +1 more | 2011-01-25 |
| 7872209 | Thermal flux processing by scanning a focused line beam | Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien +1 more | 2011-01-18 |
| 7778533 | Semiconductor thermal process control | Wolfgang Aderhold, Balasubramanian Ramachandran, Patrick F. Stone | 2010-08-17 |
| 7667162 | Semiconductor thermal process control utilizing position oriented temperature generated thermal mask | Wolfgang Aderhold, Balasubramanian Ramachandran, Patrick F. Stone | 2010-02-23 |
| 6987240 | Thermal flux processing by scanning | Dean Jennings, Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien +1 more | 2006-01-17 |
| 6532866 | Method and apparatus for orienting substrates | Ilya Perlov, Eugene Gantvarg | 2003-03-18 |
| 6493681 | Method and system for visual analysis of investment strategies | Alexey Goder | 2002-12-10 |
| 6393337 | Method and apparatus for orienting substrates | Ilya Perlov, Eugene Gantvarg | 2002-05-21 |