Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002665 | Real-time detection of particulate matter during deposition chamber manufacturing | Mehdi Vaez-Iravani, Todd Egan | 2024-06-04 |
| 11908716 | Image-based in-situ process monitoring | Guoheng Zhao, Venkatakaushik Voleti, Todd Egan, Andreas Schulze, Niranjan Ramchandra Khasgiwale +1 more | 2024-02-20 |
| 11728141 | Gas hub for plasma reactor | Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2023-08-15 |
| 11244811 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2022-02-08 |
| 11139150 | Nozzle for multi-zone gas injection assembly | Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2021-10-05 |
| 11119051 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Gregory L. Kirk, Abraham Ravid +1 more | 2021-09-14 |
| 10923371 | Metrology system for substrate deformation measurement | Mehdi Vaez-Iravani, Todd Egan, Samer Banna | 2021-02-16 |
| 10845317 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Gregory L. Kirk, Abraham Ravid +1 more | 2020-11-24 |
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Tza-Jing Gung, Vladimir Knyazik, Dan Marohl, Valentin N. Todorow +1 more | 2020-02-04 |
| 10510624 | Metrology systems with multiple derivative modules for substrate stress and deformation measurement | Mehdi Vaez-Iravani, Todd Egan, Samer Banna | 2019-12-17 |
| 10410841 | Side gas injection kit for multi-zone gas injection assembly | Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2019-09-10 |
| 10332772 | Multi-zone heated ESC with independent edge zones | Vladimir Knyazik, Samer Banna | 2019-06-25 |
| 10271416 | High efficiency triple-coil inductively coupled plasma source with phase control | Samer Banna, Waheb Bishara, Ryan Giar, Valentin N. Todorow, Dmitry Lubomirsky | 2019-04-23 |
| 10163606 | Plasma reactor with highly symmetrical four-fold gas injection | Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2018-12-25 |
| 10008368 | Multi-zone gas injection assembly with azimuthal and radial distribution control | Yan Rozenzon, Imad Yousif, Vladimir Knyazik, Bojenna Keating, Samer Banna | 2018-06-26 |
| 9659803 | Electrostatic chuck with concentric cooling base | Dmitry Lubomirsky, Samer Banna | 2017-05-23 |
| 9536710 | Tunable gas delivery assembly with internal diffuser and angular injection | Vladimir Knyazik, Samer Banna, Waheb Bishara | 2017-01-03 |
| 9472378 | Multiple zone coil antenna with plural radial lobes | Vladimir Knyazik, Samer Banna | 2016-10-18 |
| 9312104 | Coil antenna with plural radial lobes | Vladimir Knyazik, Samer Banna | 2016-04-12 |
| 9287147 | Substrate support with advanced edge control provisions | Samer Banna | 2016-03-15 |
| 8900399 | Integrated method and system for manufacturing monolithic panels of crystalline solar cells | Tirunelveli S. Ravi, Ananda H. Kumar, Ashish Asthana, Visweswaren Sivaramakrishnan | 2014-12-02 |