Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11302520 | Chamber apparatus for chemical etching of dielectric materials | Tien Fak Tan, Dmitry Lubomirsky, Son T. Nguyen, David Palagashvili, Alexander Tam +1 more | 2022-04-12 |
| 11257693 | Methods and systems to improve pedestal temperature control | Son T. Nguyen, Dmitry Lubomirsky, Chungman Kim | 2022-02-22 |
| 10460915 | Rotatable substrate support having radio frequency applicator | Satoru Kobayashi, Hiroji Hanawa, Soonam Park, Dmitry Lubomirsky | 2019-10-29 |
| 9922819 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois +2 more | 2018-03-20 |
| 9593419 | Wafer rotation in a semiconductor chamber | Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Ramprakash Sankarakrishnan, Robert W. Kim, Dale R. Du Bois +2 more | 2017-03-14 |
| 9285168 | Module for ozone cure and post-cure moisture treatment | Dmitry Lubomirsky, Jay D. Pinson, II, Adib Khan, Shankar Venkataraman | 2016-03-15 |
| 8524004 | Loadlock batch ozone cure | Dmitry Lubomirsky, Jay D. Pinson, II, Adib Khan, Shankar Venkataraman | 2013-09-03 |
| 7790229 | High resolution substrate holder leveling device and method | — | 2010-09-07 |
| 7754282 | Adjusting a spacing between a gas distribution member and a substrate support | Adrian Q. Montgomery, Jennifer Gonzales, Won Bae Bang, Rong Pan, Amna Mohammed +1 more | 2010-07-13 |
| 7572340 | High resolution substrate holder leveling device and method | — | 2009-08-11 |
| 7413612 | In situ substrate holder leveling method and apparatus | Adrian Q. Montgomery, Jennifer Gonzales, Won Bae Bang, Rong Pan, Amna Mohammed +1 more | 2008-08-19 |
| 7037376 | Backflush chamber clean | Keith Harvey, Karthik Janakiraman | 2006-05-02 |
| 5396692 | Non-linear torsional assist mechanism and method | John Busuttil | 1995-03-14 |