Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11294164 | Integrated system and method | Yoram Uziel, Albert Mariasin, Nir Merry, Rami Elichai, Zvi Goren | 2022-04-05 |
| 11189451 | Charged particle beam source and a method for assembling a charged particle beam source | Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan +3 more | 2021-11-30 |
| 11177048 | Method and system for evaluating objects | Efim Vinnitsky, Yoram Uziel, Benzion Sender, Ron Naftali | 2021-11-16 |
| 11049704 | Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber | Irit Ruach-Nir, Michal Eilon, Guy Eytan, Magen Yaacov Schulman, Sven Ruhle +1 more | 2021-06-29 |
| 10886092 | Charged particle beam source and a method for assembling a charged particle beam source | Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan +3 more | 2021-01-05 |
| 10177048 | System for inspecting and reviewing a sample | Juergen Frosien, Jacob Levin, Yoram Uziel, Boris Golberg | 2019-01-08 |
| 10056274 | System and method for forming a sealed chamber | Michael R. Rice, Paul B. Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff +3 more | 2018-08-21 |
| 10049904 | Method and system for moving a substrate | Ofer Adan, Israel Avneri, Yoram Uziel, Niranjan Ramchandra Khasgiwale | 2018-08-14 |
| 9997328 | System and method for forming a sealed chamber | Michael R. Rice, Ron Naftali, Natan Schlimoff, Israel Avneri, Yoram Uziel +3 more | 2018-06-12 |
| 9829809 | System and method for attaching a mask to a mask holder | Israel Avneri, Yoram Uziel, Nir Ben-David Dodzin, Ido Holcman | 2017-11-28 |
| 9587749 | Slit valve with a pressurized gas bearing | Michael R. Rice, Natan Schlimoff, Israel Avneri, Yoram Uziel, Erez Admoni +2 more | 2017-03-07 |
| 8772737 | Conductive element for electrically coupling an EUVL mask to a supporting chuck | Israel Avneri, Yoram Uziel, Nir Ben-David Dodzin, Ido Holcman, Itzak Yair +1 more | 2014-07-08 |
| 7428850 | Integrated in situ scanning electronic microscope review station in semiconductor wafers and photomasks optical inspection system | Ron Naftali, Yoram Uziel, Ran Vered, Eitan Pinhasi | 2008-09-30 |
| 7317606 | Particle trap for electrostatic chuck | Igor Petrov, Eitan Kidron, Guy Eitan, Igal Ben-Dayan | 2008-01-08 |
| 7112803 | Beam directing system and method for use in a charged particle beam column | Igor Petrov, Albert Karabekov | 2006-09-26 |