Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12209958 | Interferometric gas sensor | Hedser Van Brug | 2025-01-28 |
| 11774734 | Focal in-field pointing telescope system | Hedser Van Brug | 2023-10-03 |
| 11143498 | Interferometer system and use thereof | Hedser Van Brug | 2021-10-12 |
| 11067441 | Correction of curved projection of a spectrometer slit line | Hedser Van Brug | 2021-07-20 |
| 10578545 | Spatially resolved aerosol detection | Hedser Van Brug | 2020-03-03 |
| 10473526 | Spatially resolved gas detection | Hedser Van Brug | 2019-11-12 |
| 9383490 | Depolarizer, telescope and remote sensing device and method | Borgert Kruizinga, Michiel David Nijkerk | 2016-07-05 |
| 9323070 | Method for producing a diffraction grating | Henri Johannes Petrus Vink, Aaldert Hidde Van Amerongen | 2016-04-26 |
| 9304300 | Anamorphotic telescope | Borgert Kruizinga, Michiel David Nijkerk | 2016-04-05 |
| 8717535 | SLM calibration | Martinus Hendricus Hoeks, Borgert Kruizinga, Bob Streefkerk, Patricius Aloysius Jacobus Tinnemans, Erwin John Van Zwet +4 more | 2014-05-06 |
| 8237912 | Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method | Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Peter Julian Pollard | 2012-08-07 |
| 8189173 | Polarization control apparatus and method | Marcel Janssens, Oscar Franciscus Jozephus Noordman, Evert Nieuwkoop | 2012-05-29 |
| 8164740 | Illumination system coherence remover with two sets of stepped mirrors | Jacob Klinkhamer, Lev Ryzhikov, Scott Coston, Adel Joobeur, Rob Vink +1 more | 2012-04-24 |
| 8159651 | Illumination system coherence remover with a series of partially reflective surfaces | Jacob Klinkhamer, Lev Ryzhikov, Scott Coston, Adel Joobeur, Rob Vink +1 more | 2012-04-17 |
| 7969549 | Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method | Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Peter Julian Pollard | 2011-06-28 |
| 7948606 | Moving beam with respect to diffractive optics in order to reduce interference patterns | Johannes Jacobus Matheus Baselmans, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink | 2011-05-24 |
| 7826037 | Radiation beam pulse trimming | Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink, Koenraad Remi André Maria Schreel, Cornelis Cornelia De Bruijn | 2010-11-02 |
| 7768627 | Illumination of a patterning device based on interference for use in a maskless lithography system | Hedser Van Brug | 2010-08-03 |
| 7738079 | Radiation beam pulse trimming | Oscar Franciscus Jozephus Noordman, Henri Johannes Petrus Vink | 2010-06-15 |
| 7714305 | Lithographic apparatus and device manufacturing method | David Callan, Robert-Han Munnig Schmidt, George Robbins | 2010-05-11 |
| 7714986 | Laser beam conditioning system comprising multiple optical paths allowing for dose control | Pieter Willem Herman De Jager, Henri Johannes Petrus Vink, Marcus Gerhardus Hendrikus Meijerink | 2010-05-11 |
| 7649676 | System and method to form unpolarized light | Johannes Jacobus Matheus Baselmans | 2010-01-19 |
| 7626181 | Lithographic apparatus and device manufacturing method | — | 2009-12-01 |
| 7330239 | Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device | Johannes Jacobus Matheus Baselmans, Henri Johannes Petrus Vink | 2008-02-12 |
| 7180577 | Lithographic apparatus and device manufacturing method utilizing a microlens array at an image plane | Johannes Jacobus Matheus Baselmans | 2007-02-20 |