Issued Patents All Time
Showing 1–25 of 82 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400842 | Method of cleaning chamber components with metal etch residues | Wenbing Yang, Samantha Tan, Ran Lin, Tamal Mukherjee, Chunhong Zhou +2 more | 2025-08-26 |
| 12129569 | Method for conditioning semiconductor processing chamber components | Lin Xu, David Joseph WETZEL, John Daugherty, Satish SRINIVASAN, Yuanping Song +3 more | 2024-10-29 |
| 12064795 | Conditioning chamber component | Amir A. Yasseri, John Daugherty, Duane Outka, Lin Xu, Armen Avoyan +2 more | 2024-08-20 |
| 11384430 | Method for conditioning a ceramic coating | Xiaomin Bin, Duane Outka, Eric A. Pape, Gregory A. Pilgrim, Girish M. HUNDI +1 more | 2022-07-12 |
| 11124659 | Method to selectively pattern a surface for plasma resistant coat applications | Amir A. Yasseri, Duane Outka, John Daugherty | 2021-09-21 |
| 10967407 | Conditioning chamber component | Amir A. Yasseri, John Daugherty, Duane Outka, Lin Xu, Armen Avoyan +2 more | 2021-04-06 |
| 10422028 | Surface coating treatment | Lihua Huang, Siwen Li | 2019-09-24 |
| 10391526 | Electrostatic chuck cleaning fixture | Armen Avoyan, Cliff LaCroix, Kennet Baylon | 2019-08-27 |
| 9947558 | Method for conditioning silicon part | Lin Xu, Robin KOSHY, John Daugherty, Satish SRINIVASAN | 2018-04-17 |
| 9873940 | Coating system and method for coating interior fluid wetted surfaces of a component of a semiconductor substrate processing apparatus | Lin Xu, Nash W. ANDERSON, Tom Stevenson, John Daugherty, John Michael Kerns +1 more | 2018-01-23 |
| 9748078 | Dual phase cleaning chambers and assemblies comprising the same | Armen Avoyan, Cliff La Croix | 2017-08-29 |
| 9623449 | Dielectric window cleaning apparatuses | Armen Avoyan, Cliff LaCroix, John Daugherty | 2017-04-18 |
| 9546432 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Lin Xu, John Michael Kerns, William Charles, John Daugherty, Sivakami Ramanathan +3 more | 2017-01-17 |
| 9505036 | Portable sonic particle removal tool with a chemically controlled working fluid | Armen Avoyan, Cliff LaCroix, John Daugherty | 2016-11-29 |
| 9396912 | Methods for mixed acid cleaning of showerhead electrodes | Armen Avoyan, Cliff La Croix, John Daugherty | 2016-07-19 |
| 9393666 | Adapter plate for polishing and cleaning electrodes | Catherine Zhou, Duane Outka, Cliff LaCroix | 2016-07-19 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang, Duane Outka +2 more | 2016-07-12 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Lin Xu, Anthony Amadio, Robert Griffith O'Neill, Peter Holland +5 more | 2016-05-10 |
| 9293305 | Mixed acid cleaning assemblies | Armen Avoyan, Cliff La Croix, John Daugherty | 2016-03-22 |
| 9245719 | Dual phase cleaning chambers and assemblies comprising the same | Armen Avoyan, Cliff La Croix | 2016-01-26 |
| 9120201 | Platen and adapter assemblies for facilitating silicon electrode polishing | Armen Avoyan, Duane Outka, Catherine Zhou | 2015-09-01 |
| 9123651 | Dense oxide coated component of a plasma processing chamber and method of manufacture thereof | Lin Xu, John Michael Kerns, William Charles, John Daugherty, Sivakami Ramanathan +3 more | 2015-09-01 |
| 9105676 | Method of removing damaged epoxy from electrostatic chuck | Tuochuan Huang, Yan Fang, Cliff LaCroix, Neal Newton, Rish Chhatre | 2015-08-11 |
| 9082805 | System and method for testing an electrostatic chuck | Saurabh Ullal, Tuochuan Huang, Yan Fang, Jon McChesney | 2015-07-14 |
| 9079228 | Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber | Armen Avoyan, Shashank Deshmukh, David Carman | 2015-07-14 |