Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8906194 | Ultra-high aspect ratio dielectric etch | Kyeong-Koo Chi | 2014-12-09 |
| 8741165 | Reducing twisting in ultra-high aspect ratio dielectric etch | Bing Ji, Takumi Yanagawa | 2014-06-03 |
| 8475673 | Method and apparatus for high aspect ratio dielectric etch | — | 2013-07-02 |
| 8425682 | High strip rate downstream chamber | Ing-Yann Albert Wang, Jaroslaw W. Winniczek, David Cooperberg, Robert Chebi | 2013-04-23 |
| 8298336 | High strip rate downstream chamber | Ing-Yann Albert Wang, Jaroslaw W. Winniczek, David Cooperberg, Robert Chebi | 2012-10-30 |
| 7977390 | Method for plasma etching performance enhancement | Bing Ji, Takumi Yanagawa, Zhisong Huang, Lumin Li | 2011-07-12 |
| 7682986 | Ultra-high aspect ratio dielectric etch | Kyeong-Koo Chi | 2010-03-23 |
| 7547636 | Pulsed ultra-high aspect ratio dielectric etch | Kyeong-Koo Chi | 2009-06-16 |
| 7542134 | System, method and apparatus for in-situ substrate inspection | Aleksander Owczarz, Jaroslaw W. Winniczek, Luai Nasser, Alan M. Schoepp, Fred C. Redeker | 2009-06-02 |
| 7397555 | System, method and apparatus for in-situ substrate inspection | Aleksander Owczarz, Jaroslaw W. Winniczek, Luai Nasser, Alan M. Schoepp, Fred C. Redeker | 2008-07-08 |
| 7204934 | Method for planarization etch with in-situ monitoring by interferometry prior to recess etch | Linda Braly, Vahid Vahedi, Alan J. Miller | 2007-04-17 |
| 7083903 | Methods of etching photoresist on substrates | Robert Chebi, Gladys Lo | 2006-08-01 |