Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8901004 | Plasma etch method to reduce micro-loading | Tom A. Kamp, Qian Fu, I. C. Jang, Shenjian Liu | 2014-12-02 |
| 8671878 | Profile and CD uniformity control by plasma oxidation treatment | Qinghua Zhong, Sung Jin Cho, Gowri Kamarthy | 2014-03-18 |
| 8298949 | Profile and CD uniformity control by plasma oxidation treatment | Qinghua Zhong, Sung Jin Cho, Gowri Kamarthy | 2012-10-30 |
| 7303999 | Multi-step method for etching strain gate recesses | Saravanapriyan Sriraman | 2007-12-04 |
| 7204934 | Method for planarization etch with in-situ monitoring by interferometry prior to recess etch | Vahid Vahedi, Erik A. Edelberg, Alan J. Miller | 2007-04-17 |
| 7018780 | Methods for controlling and reducing profile variation in photoresist trimming | Vahid Vahedi | 2006-03-28 |