Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8901004 | Plasma etch method to reduce micro-loading | Tom A. Kamp, Qian Fu, Linda Braly, Shenjian Liu | 2014-12-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8901004 | Plasma etch method to reduce micro-loading | Tom A. Kamp, Qian Fu, Linda Braly, Shenjian Liu | 2014-12-02 |