Issued Patents All Time
Showing 25 most recent of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8359494 | Parallel fault detection | Ernest D. Adams, III, Robert J. Chong, Howard E. Castle, Thomas J. Sonderman, Alexander J. Pasadyn | 2013-01-22 |
| 8321048 | Associating data with workpieces and correlating the data with yield data | Anastasia Oshelski Peterson, Christopher A. Bode | 2012-11-27 |
| 7788065 | Method and apparatus for correlating test equipment health and test results | Eric O. Green, Rajesh Vijayaraghavan | 2010-08-31 |
| 7783455 | Methods and systems for analyzing process equipment processing variations using sensor data | — | 2010-08-24 |
| 7716004 | Method and apparatus for matching test equipment calibration | Kevin R. Lensing, Eric O. Green, Rajesh Vijayaraghavan | 2010-05-11 |
| 7581140 | Initiating test runs based on fault detection results | Alexander J. Pasadyn, Brian K. Cusson, Naomi M. Jenkins | 2009-08-25 |
| 7321993 | Method and apparatus for fault detection classification of multiple tools based upon external data | Richard J. Markle | 2008-01-22 |
| 7200779 | Fault notification based on a severity level | Susan Hickey, Michael R. Conboy | 2007-04-03 |
| 7130769 | Method of dynamically designing a preventative maintenance schedule based upon sensor data, and system for accomplishing same | Sam Allen, Michael R. Conboy | 2006-10-31 |
| 7092779 | Automated material handling system for a manufacturing facility divided into separate fabrication areas | Michael R. Conboy, Danny C. Shedd | 2006-08-15 |
| 7051250 | Routing workpieces based upon detecting a fault | Sam Allen, Michael R. Conboy, Michael L. Miller | 2006-05-23 |
| 7039495 | Management of multiple types of empty carriers in automated material handling systems | Michael R. Conboy, Patrick J. Ryan | 2006-05-02 |
| 7031793 | Conflict resolution among multiple controllers | Naomi M. Jenkins, Jin Wang, Richard J. Markle, Brian K. Cusson | 2006-04-18 |
| 6968303 | Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing | Qingsu Wang | 2005-11-22 |
| 6960774 | Fault detection and control methodologies for ion implantation processes, and system for performing same | Patrick M. Cowan, Richard J. Markle, Tom Tse | 2005-11-01 |
| 6954883 | Method and apparatus for performing fault detection using data from a database | Michael R. Conboy, Susan Hickey | 2005-10-11 |
| 6928333 | Scheduling method for automated work-cell transfer system | Michael R. Conboy, Patrick J. Ryan | 2005-08-09 |
| 6905895 | Predicting process excursions based upon tool state variables | Mark K. Sze-To | 2005-06-14 |
| 6871112 | Method for requesting trace data reports from FDC semiconductor fabrication processes | Michael R. Conboy, Bryce A. Hendrix | 2005-03-22 |
| 6871114 | Updating process controller based upon fault detection analysis | Eric O. Green, Matthew A. Purdy, Christopher A. Bode, Robert J. Chong, Gregory A. Cherry | 2005-03-22 |
| 6868512 | Fault detection system with real-time database | Michael L. Miller | 2005-03-15 |
| 6850322 | Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace | William J. Campbell, Scott Bushman, Thomas J. Sonderman | 2005-02-01 |
| 6834211 | Adjusting a trace data rate based upon a tool state | Brian K. Cusson | 2004-12-21 |
| 6834213 | Process control based upon a metrology delay | Thomas J. Sonderman, Jin Wang, Naomi M. Jenkins | 2004-12-21 |
| 6831555 | Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework | Michael L. Miller | 2004-12-14 |