Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12270748 | Method and apparatus for measuring particles | Amir A. Yasseri, Girish M. HUNDI, John Michael Kerns, John Daugherty, Cliff La Croix | 2025-04-08 |
| 12072318 | Chamber component cleanliness measurement system | Amir A. Yasseri, Armen Avoyan, Kennet Baylon, John Daugherty, Girish M. HUNDI +1 more | 2024-08-27 |
| 12064795 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, John Daugherty, Lin Xu, Armen Avoyan +2 more | 2024-08-20 |
| 11384430 | Method for conditioning a ceramic coating | Hong Shih, Xiaomin Bin, Eric A. Pape, Gregory A. Pilgrim, Girish M. HUNDI +1 more | 2022-07-12 |
| 11124659 | Method to selectively pattern a surface for plasma resistant coat applications | Amir A. Yasseri, Hong Shih, John Daugherty | 2021-09-21 |
| 10967407 | Conditioning chamber component | Amir A. Yasseri, Hong Shih, John Daugherty, Lin Xu, Armen Avoyan +2 more | 2021-04-06 |
| 9766063 | Method for treating a nonhomogenous surface | Amir A. Yasseri, Michael Lopez | 2017-09-19 |
| 9689533 | Coating method for gas delivery system | Ian Kenworthy, Fangli Hao, Leonard J. Sharpless, Yijun Du | 2017-06-27 |
| 9393666 | Adapter plate for polishing and cleaning electrodes | Catherine Zhou, Cliff LaCroix, Hong Shih | 2016-07-19 |
| 9387521 | Method of wet cleaning aluminum chamber parts | Hong Shih, Fan-Cheung Sze, Brian McMillin, John Daugherty, Yan Fang +2 more | 2016-07-12 |
| 9337002 | Corrosion resistant aluminum coating on plasma chamber components | John Daugherty, Hong Shih, Lin Xu, Anthony Amadio, Robert Griffith O'Neill +5 more | 2016-05-10 |
| 9120201 | Platen and adapter assemblies for facilitating silicon electrode polishing | Armen Avoyan, Catherine Zhou, Hong Shih | 2015-09-01 |
| 8859432 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Michael Kang, Anthony Chen, Jack Kuo, Hong Shih +1 more | 2014-10-14 |
| 8852685 | Coating method for gas delivery system | Ian Kenworthy, Fangli Hao, Leonard J. Sharpless, Yijun Du | 2014-10-07 |
| 8585844 | Extending lifetime of yttrium oxide as a plasma chamber material | Hong Shih, Shenjian Liu, John Daugherty | 2013-11-19 |
| 8580079 | Electrode carrier assemblies | Cliff La Croix, Armen Avoyan, Catherine Zhou, Hong Shih | 2013-11-12 |
| 8550880 | Platen and adapter assemblies for facilitating silicon electrode polishing | Armen Avoyan, Catherine Zhou, Hong Shih | 2013-10-08 |
| 8545639 | Method of cleaning aluminum plasma chamber parts | Hong Shih, John Daugherty, Dean J. Larson, Tuochuan Huang, Armen Avoyan +5 more | 2013-10-01 |
| 8444456 | Electrode securing platens and electrode polishing assemblies incorporating the same | Cliff La Croix, Armen Avoyan, Catherine Zhou, Hong Shih | 2013-05-21 |
| 8313635 | Bare aluminum baffles for resist stripping chambers | Fred Dennis Egley, Michael Kang, Anthony Chen, Jack Kuo, Hong Shih +1 more | 2012-11-20 |
| 8276604 | Peripherally engaging electrode carriers and assemblies incorporating the same | Jason Augustino, Armen Avoyan, Yan Fang, Hong Shih, Stephen Whitten | 2012-10-02 |
| 8276898 | Electrode transporter and fixture sets incorporating the same | Armen Avoyan, Hong Shih | 2012-10-02 |
| 8221552 | Cleaning of bonded silicon electrodes | Jason Augustino, Armen Avoyan, Stephen Whitten, Hong Shih, Yan Fang | 2012-07-17 |
| 8216388 | Extending storage time of removed plasma chamber components prior to cleaning thereof | Hong Shih, Qian Fu, Tuochuan Huang, Raphael Casaes | 2012-07-10 |
| 8171877 | Backside mounted electrode carriers and assemblies incorporating the same | Jason Augustino, Armen Avoyan, Yan Fang, Hong Shih, Stephen Whitten | 2012-05-08 |