Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272571 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Haoquan Fang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12272570 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Haoquan Fang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Wei Luo +1 more | 2025-04-08 |
| 12211709 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Haoquan Fang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2025-01-28 |
| 11694911 | Systems and methods for metastable activated radical selective strip and etch using dual plenum showerhead | Haoquan Fang, David Cheung, Gnanamani Amburose, Eunsuk Ko, Weiyi Luo +1 more | 2023-07-04 |
| 11469079 | Ultrahigh selective nitride etch to form FinFET devices | Kwame Eason, Pilyeon Park, Faisal Yaqoob, Joon Hong Park, Mark Kawaguchi +3 more | 2022-10-11 |
| 10727089 | Systems and methods for selectively etching film | James Eugene Caron, Ivelin Angelov, Joon Hong Park | 2020-07-28 |
| 10283615 | Ultrahigh selective polysilicon etch with high throughput | Kwame Eason, Faisal Yaqoob, Joon Hong Park | 2019-05-07 |
| 10267728 | Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system | Ilia Kalinovski, Haoquan Fang, David Cheung | 2019-04-23 |
| 10192751 | Systems and methods for ultrahigh selective nitride etch | Faisal Yaqoob, Pilyeon Park, Helen Zhu, Joon Hong Park | 2019-01-29 |
| 10147588 | System and method for increasing electron density levels in a plasma of a substrate processing system | Kwame Eason, James Eugene Caron, Ivelin Angelov, Joon Hong Park | 2018-12-04 |
| 9837286 | Systems and methods for selectively etching tungsten in a downstream reactor | Helen Zhu, George Matamis, Brad Jacobs, Joon Hong Park, Joydeep Guha | 2017-12-05 |
| 9640409 | Self-limited planarization of hardmask | Joon Hong Park | 2017-05-02 |
| 9515156 | Air gap spacer integration for improved fin device performance | Paul R. Besser, Bart J. van Schravendijk, Yoshie Kimura, Gerardo Delgadino, Harald Orkorn-Schmidt | 2016-12-06 |
| 8384409 | Ultra-thin organic TFT chemical sensor, making thereof, and sensing method | Andrew C. Kummel, William C. Trogler, Thomas Gredig | 2013-02-26 |
| 8129280 | Substrate device having a tuned work function and methods of forming thereof | Rongjun Wang, Xianmin Tang, Zhendong Liu, Srinivas Gandikota | 2012-03-06 |