Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466365 | Film-forming apparatus | Toshiaki Fujisato, Yuichi FURUYA | 2022-10-11 |
| 11441224 | Method of controlling substrate processing apparatus, and substrate processing apparatus | Yuichi FURUYA, Toshiaki Fujisato | 2022-09-13 |
| 11396704 | Substrate holder and film forming apparatus | Toshiaki Fujisato, Takashi Mochizuki, Kouki Suzuki, Hwajun Noh | 2022-07-26 |
| 11280002 | Placement apparatus and processing apparatus | Kohichi Satoh, Toshiaki Fujisato | 2022-03-22 |
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Satoshi Yonekura, Satoshi Takeda, Motoshi FUKUDOME, Kyoko Ikeda | 2022-03-22 |
| 10526702 | Film forming apparatus | Eiichi KOMORI, Manabu Amikura | 2020-01-07 |
| 10221478 | Film formation device | Kensaku Narushima, Kentaro Asakura, Seishi Murakami | 2019-03-05 |
| 10156014 | Gas treatment apparatus and gas treatment method | Takashi Kakegawa, Yuichi FURUYA | 2018-12-18 |
| 10094019 | Film forming apparatus | Eiichi KOMORI, Manabu Amikura | 2018-10-09 |
| 8334481 | Mounting table structure, and processing apparatus | Tomohito Komatsu, Hirohiko Yamamoto | 2012-12-18 |
| D658692 | Liner for plasma processing apparatus | Kouki Suzuki, Koichi Yamazaki | 2012-05-01 |
| 7367350 | Processing device and method of maintaining the device | Kenji Homma, Akihiko Tsukada, Kouji Shimomura | 2008-05-06 |