| 11919120 |
Polishing system with contactless platen edge control |
Jay Gurusamy, Danielle Loi, Steven M. Zuniga |
2024-03-05 |
| 9799578 |
Peak-based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, Boguslaw A. Swedek |
2017-10-24 |
| 9564377 |
Peak-based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, Boguslaw A. Swedek |
2017-02-07 |
| 9056383 |
Path for probe of spectrographic metrology system |
Jeffrey Drue David, Benjamin Cherian, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld +4 more |
2015-06-16 |
| 9013176 |
Methods and apparatus for sensing a substrate in a load cup |
Jim K. Atkinson, Jonathan P. Domin, Andrew Q. Liu |
2015-04-21 |
| 8734202 |
Load cup substrate sensing |
Thomas Lawrence Terry |
2014-05-27 |
| 8591698 |
Peak-based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, Boguslaw A. Swedek |
2013-11-26 |
| 8454408 |
Load cup substrate sensing |
Thomas Lawrence Terry |
2013-06-04 |
| 8287330 |
Reducing polishing pad deformation |
Doyle E. Bennett, Boguslaw A. Swedek |
2012-10-16 |
| 7998358 |
Peak-based endpointing for chemical mechanical polishing |
Dominic J. Benvegnu, Bogdan Swedek |
2011-08-16 |
| 7621798 |
Reducing polishing pad deformation |
Doyle E. Bennett, Boguslaw A. Swedek |
2009-11-24 |
| 7210980 |
Sealed polishing pad, system and methods |
Bogdan Swedek, Jeffrey Drue David, Dominic J. Benvegnu |
2007-05-01 |
| 7163437 |
System with sealed polishing pad |
Bogdan Swedek, Jeffrey Drue David, Dominic J. Benvegnu |
2007-01-16 |
| 7112119 |
Sealed polishing pad methods |
Bogdan Swedek, Jeffrey Drue David, Dominic J. Benvegnu |
2006-09-26 |
| 7044832 |
Load cup for chemical mechanical polishing |
Alpay Yilmaz, Simon Yavelberg, Toshikazu Tomita, Hui Chen, Noel Manto +1 more |
2006-05-16 |
| 6905399 |
Conditioning mechanism for chemical mechanical polishing |
— |
2005-06-14 |
