Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826875 | Window in thin polishing pad | Yongqi Hu, Kadthala Ramaya Narendrnath | 2023-11-28 |
| 11161218 | Window in thin polishing pad | Yongqi Hu, Kadthala Ramaya Narendrnath | 2021-11-02 |
| 10213894 | Method of placing window in thin polishing pad | Yongqi Hu, Kadthala Ramaya Narendrnath | 2019-02-26 |
| 8734202 | Load cup substrate sensing | David J. Lischka | 2014-05-27 |
| 8454408 | Load cup substrate sensing | David J. Lischka | 2013-06-04 |