Issued Patents All Time
Showing 25 most recent of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043433 | Method of inspecting surface and method of manufacturing semiconductor device | Sung Yoon Ryu, Yu-Sin Yang, Yun-Jung Jee, Gil-woo Song | 2021-06-22 |
| 10969428 | Method of inspecting pattern defect | Young-Hoon Sohn, Yu-Sin Yang | 2021-04-06 |
| 10593032 | Defect inspection method and defect inspection apparatus | Sung Yoon Ryu, Joon-Seo Song, Yu-Sin Yang, Yun-Jung Jee | 2020-03-17 |
| 10585115 | Scanning probe inspector | Duck Mahn Oh, Sung Yoon Ryu, Young-Hoon Sohn, Yun-Jung Jee | 2020-03-10 |
| 10527556 | Optical measuring method and apparatus, and method of manufacturing semiconductor device using the same | Min Ho Rim, Jung Soo Kim, Young-Hoon Sohn, Yu-Sin Yang, Yun-Jung Jee | 2020-01-07 |
| 10373796 | Method of inspecting wafer using electron beam | Souk Kim, Woo-Seok Ko, Sang-Kil Lee, Kwang Il Shin, Yu-Sin Yang +1 more | 2019-08-06 |
| 10281410 | Systems and methods of testing semiconductor devices using simultaneously scanning of a plurality of regions therein and methods of forming semiconductor devices using the same | Min Ho Rim, Yu-Sin Yang, Yun-Jung Jee | 2019-05-07 |
| 10249544 | Method of inspecting surface and method of manufacturing semiconductor device | Sung Yoon Ryu, Yu-Sin Yang, Yun-Jung Jee, Gil-woo Song | 2019-04-02 |
| 10222414 | Apparatus and method for exchanging probe | Jae Wan Hong, Jeong Hoi Kim, Yu-Sin Yang, Sang-Kil Lee | 2019-03-05 |
| 10068324 | 3D profiling system of semiconductor chip and method for operating the same | Jung Soo Kim, Jin Kwan Kim, Yu-Sin Yang, Soo Seok Lee | 2018-09-04 |
| 9939388 | Apparatus for inspecting wafer | Choon-Shik Leem, Woo-Jin Jung | 2018-04-10 |
| 9934939 | Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof | Min Kook Kim, Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee | 2018-04-03 |
| 9897552 | Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system | Tae-Joong Kim, Yong-Deok Jeong, Kwang Soo Kim, Byeong Hwan Jeon, Yu-Sin Yang +1 more | 2018-02-20 |
| 9892983 | Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same | Min Kook Kim, Bang-Won Kim, Yu-Sin Yang, Young-Jee Yoon, Sang-Kil Lee +1 more | 2018-02-13 |
| 9831626 | Broadband light source and optical inspector having the same | Sung Yoon Ryu, Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee, Seong Jin YUN | 2017-11-28 |
| 9733178 | Spectral ellipsometry measurement and data analysis device and related systems and methods | Sung Yoon Ryu, Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee | 2017-08-15 |
| 9678020 | Apparatus and method for inspection of substrate defect | Joon-Seo Song, Woo-Seok Ko, Ji-Young Shin, Seong Jin YUN, Yu-Sin Yang +1 more | 2017-06-13 |
| 9659743 | Image creating method and imaging system for performing the same | Jung-Hwan Kim, Min Kook Kim, Yu-Sin Yang, Sang-Kil Lee | 2017-05-23 |
| 9455206 | Overlay measuring method and system, and method of manufacturing semiconductor device using the same | Seong Jin YUN, Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee | 2016-09-27 |
| 9417055 | Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film | Sung Yoon Ryu, Sang-Kil Lee, Woo-Seok Ko, Ho-Jeong Kwak, Souk Kim +2 more | 2016-08-16 |
| 9261532 | Conductive atomic force microscope and method of operating the same | Hyun-Woo Kim, Woo-Seok Ko, Young Hwan Kim, Jeong Hoi Kim, Baek-man Sung +5 more | 2016-02-16 |
| 8759763 | Method and apparatus to measure step height of device using scanning electron microscope | Young-Hoon Sohn, Jin Woo Lee, Yong-Deok Jeong, Yu-Sin Yang, Sang-Kil Lee | 2014-06-24 |
| 8551791 | Apparatus and method for manufacturing semiconductor devices through layer material dimension analysis | Jang-Ik Park, Hwan-Shik Park, Ji Hye Kim, Kwan-Woo Ryu, Kong-Jung Sa +1 more | 2013-10-08 |
| 8446583 | Light focusing unit and spectrum measuring apparatus having the same | Hyun Jong Kim, Hwan-Shik Park | 2013-05-21 |
| 8184899 | Method of detecting a defect on an object | Yu-Sin Yang, Kyung-Suk Song, Ji-Hae Kim | 2012-05-22 |