Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10281412 | Apparatus for measuring semiconductor device | Yeon-Joong Kim | 2019-05-07 |
| 9939388 | Apparatus for inspecting wafer | Woo-Jin Jung, Chung-Sam Jun | 2018-04-10 |
| 9551653 | Methods for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Jung-Hoon Byun +2 more | 2017-01-24 |
| 9322771 | Apparatus and method for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Jung-Hoon Byun +2 more | 2016-04-26 |