Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551653 | Methods for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Ji-Hye Lee +2 more | 2017-01-24 |
| 9322771 | Apparatus and method for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Ji-Hye Lee +2 more | 2016-04-26 |