Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551653 | Methods for monitoring semiconductor fabrication processes using polarized light | Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Jung-Hoon Byun, Ji-Hye Lee +2 more | 2017-01-24 |
| 9322771 | Apparatus and method for monitoring semiconductor fabrication processes using polarized light | Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Jung-Hoon Byun, Ji-Hye Lee +2 more | 2016-04-26 |
| 9165354 | Method of analyzing photolithography processes | Hyo-Cheon Kang, Deok-Yong Kim, Jae-Kwan Park, Jeong-Ho Ahn, Soo-Bok Chin | 2015-10-20 |