Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9551653 | Methods for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Jung-Hoon Byun +2 more | 2017-01-24 |
| 9322771 | Apparatus and method for monitoring semiconductor fabrication processes using polarized light | Woong-Kyu Son, Kwang Hoon Kim, Deok-Yong Kim, Sung-Soo Moon, Jung-Hoon Byun +2 more | 2016-04-26 |
| 9165354 | Method of analyzing photolithography processes | Woong-Kyu Son, Hyo-Cheon Kang, Deok-Yong Kim, Jae-Kwan Park, Jeong-Ho Ahn | 2015-10-20 |
| 8890069 | Method for detecting defect of substrate | Jong-Cheon Sun, Hyung-Seop Kim, Hee-Won Sunwoo, Byoung-Ho Lee, Dong-Chul Ihm | 2014-11-18 |