| 12387909 |
Low frequency RF generator and associated electrostatic chuck |
Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick, John Holland, Alexander Matyushkin |
2025-08-12 |
| 12387916 |
Magnetic field control system |
Alecia Chantalle Griffin, Anthony de la Llera, Peter Bradley Phillips |
2025-08-12 |
| 12362159 |
Systems and methods for controlling a plasma sheath characteristic |
Alexei Marakhtanov, James Eugene Caron, John Holland, Felix Kozakevich, Ranadeep Bhowmick |
2025-07-15 |
| 12354840 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber |
Ranadeep Bhowmick, John Holland, Felix Kozakevich, Alexei Marakhtanov |
2025-07-08 |
| 12266505 |
Systems and methods for using binning to increase power during a low frequency cycle |
Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick, John Holland |
2025-04-01 |
| 12165844 |
Uniformity control circuit for impedance match |
Alexei Marakhtanov, Felix Kozakevich, John Holland |
2024-12-10 |
| 12080518 |
Impedance match with an elongated RF strap |
Felix Kozakevich, Alexei Marakhtanov, Ranadeep Bhowmick, John Holland |
2024-09-03 |
| 11935726 |
High speed synchronization of plasma source/bias power delivery |
Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more |
2024-03-19 |
| 11908660 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber |
Ranadeep Bhowmick, John Holland, Felix Kozakevich, Alexei Marakhtanov |
2024-02-20 |
| 11335539 |
Systems and methods for optimizing power delivery to an electrode of a plasma chamber |
Ranadeep Bhowmick, John Holland, Felix Kozakevich, Alexei Marakhtanov |
2022-05-17 |
| 11158488 |
High speed synchronization of plasma source/bias power delivery |
Aaron T. Radomski, Benjamin J. Gitlin, Larry J. Fisk, II, Mariusz Oldziej, Aaron Michael Burry +5 more |
2021-10-26 |
| 10916409 |
Active control of radial etch uniformity |
Alexei Marakhtanov, Felix Kozakevich, John Holland, Kenneth Lucchesi |
2021-02-09 |
| 8741165 |
Reducing twisting in ultra-high aspect ratio dielectric etch |
Erik A. Edelberg, Takumi Yanagawa |
2014-06-03 |
| 8691701 |
Strip with reduced low-K dielectric damage |
Andrew D. Bailey, III, Maryam Moravej, Stephen M. Sirard |
2014-04-08 |
| 8236188 |
Method for low-K dielectric etch with reduced damage |
Kenji Takeshita, Andrew D. Bailey, III, Eric A. Hudson, Maryam Moravej, Stephen M. Sirard +6 more |
2012-08-07 |
| 7977390 |
Method for plasma etching performance enhancement |
Erik A. Edelberg, Takumi Yanagawa, Zhisong Huang, Lumin Li |
2011-07-12 |
| 7581549 |
Method for removing carbon-containing residues from a substrate |
Andrew David Johnson, Hoshang Subawalla, Raymond Nicholas Vrtis, Eugene Joseph Karwacki, Jr., Robert Gordon Ridgeway +4 more |
2009-09-01 |
| 7371688 |
Removal of transition metal ternary and/or quaternary barrier materials from a substrate |
Martin J. Plishka, Dingjun Wu, Peter Badowski, Eugene Joseph Karwacki, Jr. |
2008-05-13 |
| 7357138 |
Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials |
Stephen Andrew Motika, Ronald Martin Pearlstein, Eugene Joseph Karwacki, Jr., Dingjun Wu |
2008-04-15 |
| 7285154 |
Xenon recovery system |
Eugene Joseph Karwacki, Jr., Timothy Christopher Golden, Stephen Andrew Motika, Thomas Stephen Farris |
2007-10-23 |
| 7267842 |
Method for removing titanium dioxide deposits from a reactor |
Dingjun Wu, Philip Bruce Henderson, Eugene Joseph Karwacki, Jr. |
2007-09-11 |
| 7119032 |
Method to protect internal components of semiconductor processing equipment using layered superlattice materials |
Stephen Andrew Motika, Dingjun Wu, Eugene Joseph Karwacki, Jr., David A. Roberts |
2006-10-10 |
| 7055263 |
Method for cleaning deposition chambers for high dielectric constant materials |
Dingjun Wu, Stephen Andrew Motika, Eugene Joseph Karwacki, Jr. |
2006-06-06 |
| 6686594 |
On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring |
Robert Gordon Ridgeway, Eugene Joseph Karwacki, Jr., Howard Paul Withers, Jr., Steven Rogers, Peter J. Maroulis +1 more |
2004-02-03 |
| 6392068 |
Carborane containing cholesterol, a new type of molecule for targeted boron drug delivery |
Donghao Lu |
2002-05-21 |
