Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7674350 | Feature dimension control in a manufacturing process | Haoren Zhuang, Matthias Lipinski, Chandrasekhar Sarma, Jingyu Lian | 2010-03-09 |
| 7666800 | Feature patterning methods | Sajan Marokkey, Klaus Herold, Chandrasekhar Sarma | 2010-02-23 |
| 7629225 | Methods of manufacturing semiconductor devices and structures thereof | Markus Naujok, Hermann Wendt, Muhammed Shafi Pallachalil | 2009-12-08 |
| 7615840 | Device performance improvement using flowfill as material for isolation structures | Roland Hampp, Jin-Ping Han, O Sung Kwon | 2009-11-10 |
| 7541288 | Methods of forming integrated circuit structures using insulator deposition and insulator gap filling techniques | Jun Jung Kim, Ja-Hum Ku, Jae-eon Park, Sunfei Fang, O-Sung Kwon +2 more | 2009-06-02 |
| 7298009 | Semiconductor method and device with mixed orientation substrate | Jiang Yan, Chun-Yung Sung, Danny Pak-Chum Shum | 2007-11-20 |
| 7030506 | Mask and method for using the mask in lithographic processing | Syed Zaidi, Gary Williams | 2006-04-18 |
| 6954002 | System and method of enhancing alignment marks | Shoaib Zaidi, Gary Williams | 2005-10-11 |
| 6670646 | Mask and method for patterning a semiconductor wafer | Zhijian Lu, Shahid Butt | 2003-12-30 |
| 6521542 | Method for forming dual damascene structure | Mike Armacost, Bruno Spuler, Gabriela Brase | 2003-02-18 |
| 6420101 | Method of reducing post-development defects in and around openings formed in photoresist by use of non-patterned exposure | Zhijian Lu, Alan C. Thomas, Kuang-Jung Chen, Margaret C. Lawson | 2002-07-16 |
| 6379869 | Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning | Uwe Schroeder, Gerhard Kunkel, Bruno Spuler | 2002-04-30 |
| 6372408 | Method of reducing post-development defects in and around openings formed in photoresist by use of multiple development/rinse cycles | Zhijian Lu, Alan C. Thomas, Kuang-Jung Chen, Margaret C. Lawson | 2002-04-16 |