Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9345121 | Waveguide-based apparatus for exciting and sustaining a plasma | Mehrnoosh Vahidpour, Peter Williams | 2016-05-17 |
| 7084966 | Optical measurement of device features using lenslet array illumination | — | 2006-08-01 |
| 7030506 | Mask and method for using the mask in lithographic processing | Alois Gutmann, Gary Williams | 2006-04-18 |
| 6842235 | Optical measurement of planarized features | Gangadhara S. Mathad | 2005-01-11 |