Issued Patents All Time
Showing 26–50 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304749 | Charged-particle exposure apparatus with electrostatic zone plate | Stefan Cernusca | 2012-11-06 |
| 8278635 | Global point spreading function in multi-beam patterning | Heinrich Fragner, Stefan Cernusca | 2012-10-02 |
| 8258488 | Compensation of dose inhomogeneity and image distortion | Heinrich Fragner, Stefan Cernusca | 2012-09-04 |
| 8222621 | Method for maskless particle-beam exposure | Heinrich Fragner, Robert Nowak, Adrian Bürli | 2012-07-17 |
| 8198601 | Method for producing a multi-beam deflector array device having electrodes | Heinrich Fragner | 2012-06-12 |
| 8183543 | Multi-beam source | — | 2012-05-22 |
| 8115183 | Method for maskless particle-beam exposure | — | 2012-02-14 |
| 8057972 | Constant current multi-beam patterning | Heinrich Fragner, Adrian Bürli | 2011-11-15 |
| 8049189 | Charged particle system | Herbert Buschbeck, Gerhard Stengl, Herbert Vonach | 2011-11-01 |
| 8026495 | Charged particle beam exposure system | — | 2011-09-27 |
| 7781748 | Particle-beam exposure apparatus with overall-modulation of a patterned beam | — | 2010-08-24 |
| 7777201 | Method for maskless particle-beam exposure | Heinrich Fragner | 2010-08-17 |
| 7763851 | Particle-beam apparatus with improved wien-type filter | — | 2010-07-27 |
| 7737422 | Charged-particle exposure apparatus | Stefan Cernusca, Gerhard Stengl | 2010-06-15 |
| 7714298 | Pattern definition device having distinct counter-electrode array plate | — | 2010-05-11 |
| 7687783 | Multi-beam deflector array device for maskless particle-beam processing | Hans Loschner, Samuel Kvasnica, Reinhard Springer, Mathias Irmscher, Florian Letzkus +1 more | 2010-03-30 |
| 7598499 | Charged-particle exposure apparatus | — | 2009-10-06 |
| 7388217 | Particle-optical projection system | Herbert Buschbeck, Gertraud Lammer, Alfred Chalupka, Robert Nowak, Gerhard Stengl | 2008-06-17 |
| 7368738 | Advanced pattern definition for particle-beam exposure | — | 2008-05-06 |
| 7276714 | Advanced pattern definition for particle-beam processing | Stefan Cernusca | 2007-10-02 |
| 7214951 | Charged-particle multi-beam exposure apparatus | Gerhard Stengl, Hans Loschner | 2007-05-08 |
| 7033647 | Method of synthesising carbon nano tubes | Xinhe Tang, Klaus Mauthner, Ernst Hammel, Hans Loschner, Gerhard Stengl | 2006-04-25 |
| 6989546 | Particle multibeam lithography | Hans Loschner, Gerhard Stengl, Herbert Vonach | 2006-01-24 |
| 6909103 | Ion irradiation of a target at very high and very low kinetic ion energies | Gerhard Stengl, Hans Loeschner | 2005-06-21 |
| 6858118 | Apparatus for enhancing the lifetime of stencil masks | Hans Loschner, Gerhard Stengl | 2005-02-22 |