Issued Patents All Time
Showing 51–51 of 51 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Hans Loeschner, Gerhard Stengl, Herbert Vonach, Alfred Chalupka, Gertraud Lammer +3 more | 2004-07-27 |