Issued Patents All Time
Showing 26–50 of 71 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7566892 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Katsuhiro Sasada | 2009-07-28 |
| 7459681 | Scanning electron microscope | Noriaki Arai, Makoto Ezumi | 2008-12-02 |
| 7435958 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Katsuhiro Sasada | 2008-10-14 |
| 7411192 | Focused ion beam apparatus and focused ion beam irradiation method | Koichiro Takeuchi, Tohru Ishitani | 2008-08-12 |
| 7408172 | Charged particle beam apparatus and charged particle beam irradiation method | Mitsugu Sato, Hideo Todokoro, Makoto Ezumi, Noriaki Arai, Takashi Doi | 2008-08-05 |
| 7399966 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi, Naomasa Suzuki | 2008-07-15 |
| 7375323 | Electron beam apparatus with aberration corrector | Takeshi Kawasaki, Takaho Yoshida, Hideo Todokoro | 2008-05-20 |
| 7372028 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Akira Ikegami, Hideo Todokoro, Tatsuaki Ishijima, Takahiro Sato +2 more | 2008-05-13 |
| 7315024 | Monochromator and scanning electron microscope using the same | Shunroku Taya, Hideo Todokoro, Tadashi Otaka, Mitsugu Sato, Makoto Ezumi | 2008-01-01 |
| 7294835 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi, Naomasa Suzuki | 2007-11-13 |
| 7282722 | Charged particle beam apparatus and charged particle beam irradiation method | Mitsugu Sato, Hideo Todokoro, Makoto Ezumi, Noriaki Arai, Takashi Doi | 2007-10-16 |
| 7205550 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Katsuhiro Sasada | 2007-04-17 |
| 7199365 | Electron beam apparatus with aberration corrector | Takeshi Kawasaki, Takaho Yoshida, Hideo Todokoro | 2007-04-03 |
| 7087899 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Akira Ikegami, Hideo Todokoro, Tatsuaki Ishijima, Takahiro Sato +2 more | 2006-08-08 |
| 7075078 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi, Mitsugu Sato | 2006-07-11 |
| 7049591 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi, Naomasa Suzuki | 2006-05-23 |
| 7030376 | Electron beam apparatus and method for production of its specimen chamber | Tsuyoshi Inanobe, Sho Takami, Katsuhiro Sasada | 2006-04-18 |
| 7022983 | Monochromator and scanning electron microscope using the same | Shunroku Taya, Hideo Todokoro, Tadashi Otaka, Mitsugu Sato, Makoto Ezumi | 2006-04-04 |
| 6982427 | Electron beam apparatus with aberration corrector | Takeshi Kawasaki, Takaho Yoshida, Hideo Todokoro | 2006-01-03 |
| 6979821 | Scanning electron microscope | Naomasa Suzuki, Toshiro Kubo, Noriaki Arai, Mitsugu Sato, Hideo Todokoro | 2005-12-27 |
| 6956211 | Charged particle beam apparatus and charged particle beam irradiation method | Mitsugu Sato, Hideo Todokoro, Makoto Ezumi, Noriaki Arai, Takashi Doi | 2005-10-18 |
| 6946656 | Sample electrification measurement method and charged particle beam apparatus | Makoto Ezumi, Akira Ikegami, Hideo Todokoro, Tatsuaki Ishijima, Takahiro Sato +2 more | 2005-09-20 |
| 6885001 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi, Mitsugu Sato | 2005-04-26 |
| 6872944 | Scanning electron microscope | Hideo Todokoro, Shou Takami, Makoto Ezumi, Osamu Yamada, Tomohiro Kudo | 2005-03-29 |
| 6847038 | Scanning electron microscope | Hideo Todokoro, Makoto Ezumi, Naomasa Suzuki | 2005-01-25 |