Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9217199 | Substrate processing apparatus | Yoshiro Hirose, Kenji Kanayama, Norikazu Mizuno, Yosuke Ota | 2015-12-22 |
| 9196473 | Method of manufacturing an oxynitride film for a semiconductor device | Yosuke Ota, Yoshiro Hirose, Naonori Akae | 2015-11-24 |
| 9136114 | Method of manufacturing semiconductor device, substrate processing method, computer-readable medium with program for executing a substrate processing method, and substrate processing apparatus | Ryota Sasajima, Yoshinobu Nakamura, Yoshiro Hirose | 2015-09-15 |
| 9018104 | Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus | Yoshiro Hirose, Kenji Kanayama, Norikazu Mizuno, Yosuke Ota | 2015-04-28 |
| 9011601 | Substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yosuke Ota | 2015-04-21 |
| 8946092 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2015-02-03 |
| 8809204 | Method of manufacturing semiconductor device and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yosuke Ota | 2014-08-19 |
| 8679989 | Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion | Sadao Nakashima, Takahiro Maeda, Kiyohiko Maeda, Kenji Kameda | 2014-03-25 |
| 8546272 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Tsukasa Kamakura, Yoshinobu Nakamura, Ryota Sasajima | 2013-10-01 |
| 8415258 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yosuke Ota, Ryota Sasajima | 2013-04-09 |
| 8409988 | Method of manufacturing semiconductor device and substrate processing apparatus | Hajime Karasawa, Yoshiro Hirose | 2013-04-02 |
| 8410001 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yoshiro Hirose, Tsukasa Kamakura, Yukinao KAGA | 2013-04-02 |
| 8410003 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yosuke Ota, Yoshiro Hirose, Naonari Akae | 2013-04-02 |
| 8367557 | Method of forming an insulation film having low impurity concentrations | Naonori Akae, Yoshiro Hirose, Yosuke Ota | 2013-02-05 |
| 8202809 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yosuke Ota, Naonori Akae, Yoshiro Hirose | 2012-06-19 |
| 8076251 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Naonori Akae, Yoshiro Hirose, Yosuke Ota, Ryota Sasajima | 2011-12-13 |
| 7884034 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshiro Hirose, Tomohide Kato, Nanori Akae | 2011-02-08 |
| 6943089 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus | Hajime Karasawa | 2005-09-13 |
| 6821871 | Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus | Hisashi Nomura, Hajime Karasawa, Yoshinori Imai, Tadanori Yoshida, Kenichi Yamaguchi | 2004-11-23 |