Issued Patents All Time
Showing 26–50 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8437534 | Defect classification method and apparatus, and defect inspection apparatus | Hisae Shibuya, Shunji Maeda | 2013-05-07 |
| 8427634 | Defect inspection method and apparatus | Yuta Urano, Shunji Maeda, Kaoru Sakai | 2013-04-23 |
| 8355123 | Defect inspection apparatus and its method | Hisae Shibuya, Shunji Maeda | 2013-01-15 |
| 8310666 | Apparatus of inspecting defect in semiconductor and method of the same | Shunji Maeda, Hisae Shibuya | 2012-11-13 |
| 8310665 | Inspecting method and inspecting apparatus for substrate surface | Yoshimasa Oshima, Shunji Maeda, Hisae Shibuya, Yuta Urano, Toshiyuki Nakao +1 more | 2012-11-13 |
| 8306312 | Method and apparatus for detecting pattern defects | Hisae Shibuya, Yuji Takagi | 2012-11-06 |
| 8289507 | Method of apparatus for detecting particles on a specimen | Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2012-10-16 |
| 8274651 | Method of inspecting a semiconductor device and an apparatus thereof | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2012-09-25 |
| 8269959 | Inspection method and inspection apparatus | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2012-09-18 |
| 8228495 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu +2 more | 2012-07-24 |
| 8218138 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2012-07-10 |
| 8149396 | Defect inspection apparatus and its method | Hisae Shibuya, Shunji Maeda | 2012-04-03 |
| 8144337 | Inspecting method and inspecting apparatus for substrate surface | Yoshimasa Oshima, Shunji Maeda, Hisae Shibuya, Yuta Urano, Toshiyuki Nakao +1 more | 2012-03-27 |
| 8107065 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Sachio Uto, Shunji Maeda, Yuta Urano | 2012-01-31 |
| 8094295 | Inspection method and inspection apparatus | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2012-01-10 |
| 8072597 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Kenji Watanabe, Tetsuya Watanabe +1 more | 2011-12-06 |
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2011-10-18 |
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu +2 more | 2011-09-06 |
| 7973920 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2011-07-05 |
| 7952699 | Apparatus of inspecting defect in semiconductor and method of the same | Shunji Maeda, Hisae Shibuya | 2011-05-31 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2011-05-31 |
| 7940385 | Defect inspection apparatus and its method | Hisae Shibuya, Shunji Maeda | 2011-05-10 |
| 7912276 | Method and apparatus for detecting pattern defects | Hisae Shibuya, Yuji Takagi | 2011-03-22 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2011-03-08 |
| 7859656 | Defect inspection method and system | Sachio Uto, Hiroyuki Nakano, Yukihiro Shibata, Yuta Urano | 2010-12-28 |