Issued Patents All Time
Showing 51–75 of 84 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7817261 | Method of apparatus for detecting particles on a specimen | Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2010-10-19 |
| 7768634 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu +2 more | 2010-08-03 |
| 7768635 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2010-08-03 |
| 7751036 | Apparatus of inspecting defect in semiconductor and method of the same | Shunji Maeda, Hisae Shibuya | 2010-07-06 |
| 7751037 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Sachio Uto, Shunji Maeda, Yuta Urano | 2010-07-06 |
| 7720275 | Method and apparatus for detecting pattern defects | Hisae Shibuya, Yuji Takagi | 2010-05-18 |
| 7664608 | Defect inspection method and apparatus | Yuta Urano, Shunji Maeda, Kaoru Sakai | 2010-02-16 |
| 7643138 | Method of inspecting a semiconductor device and an apparatus thereof | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2010-01-05 |
| 7586593 | Inspection method and inspection apparatus | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2009-09-08 |
| 7586594 | Method for inspecting defect and apparatus for inspecting defect | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2009-09-08 |
| 7528942 | Method and apparatus for detecting defects | Hiroyuki Nakano, Toshihiko Nakata, Sachio Uto, Shunji Maeda, Yuta Urano | 2009-05-05 |
| 7511806 | Apparatus and method for inspecting defects | Minori Noguchi, Yoshimasa Ooshima, Hidetoshi Nishiyama, Tetsuya Watanabe | 2009-03-31 |
| 7492452 | Defect inspection method and system | Sachio Uto, Hiroyuki Nakano, Yukihiro Shibata, Yuta Urano | 2009-02-17 |
| 7474394 | Apparatus of inspecting defect in semiconductor and method of the same | Shunji Maeda, Hisae Shibuya | 2009-01-06 |
| 7417723 | Method of inspecting a semiconductor device and an apparatus thereof | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2008-08-26 |
| 7417721 | Defect detector and defect detecting method | Sachio Uto, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu +2 more | 2008-08-26 |
| 7411207 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Kenji Watanabe, Tetsuya Watanabe +1 more | 2008-08-12 |
| 7369223 | Method of apparatus for detecting particles on a specimen | Minori Noguchi, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2008-05-06 |
| 7332359 | Semiconductor device inspection method | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama | 2008-02-19 |
| 7333192 | Apparatus and method for inspecting defects | Hiroyuki Nakano, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano +1 more | 2008-02-19 |
| 7315366 | Apparatus and method for inspecting defects | Minori Noguchi, Yoshimasa Ooshima, Hidetoshi Nishiyama, Tetsuya Watanabe | 2008-01-01 |
| 7315363 | Inspection method and inspection apparatus | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2008-01-01 |
| 7262425 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Kenji Watanabe, Tetsuya Watanabe +1 more | 2007-08-28 |
| 7256412 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ooshima, Kenji Watanabe, Tetsuya Watanabe +1 more | 2007-08-14 |
| 7248352 | Method for inspecting defect and apparatus for inspecting defect | Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2007-07-24 |