Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8047896 | Polishing apparatus, polishing method, and processing apparatus | Kenya Ito, Masaya Seki, Hiroaki Kusa | 2011-11-01 |
| 8029333 | Device for polishing peripheral edge of semiconductor wafer | Kenya Ito, Mitsuhiko Shirakashi, Kazuyuki Inoue, Kenji Yamaguchi, Masaya Seki +5 more | 2011-10-04 |
| 7976361 | Polishing apparatus and polishing method | Masaya Seki, Hiroaki Kusa, Kenya Ito | 2011-07-12 |
| 7744445 | Polishing apparatus and polishing method | Takeo Kubota, Atsushi Shigeta, Gen Toyota, Daisaku Fukuoka, Kenya Ito | 2010-06-29 |
| D616389 | Vacuum contact pad | — | 2010-05-25 |
| RE39262 | Polishing apparatus including turntable with polishing surface of different heights | Masayoshi Hirose, Yoshimi Sasaki, Akira Ogata, Seiji Ishikawa, Hirokuni Hiyama +1 more | 2006-09-05 |
| 6889730 | Hydraulic drive system | Masao Shinoda, Shimpei Miyakawa, Chishiro Yamashina, Yoshihiro Mochizuki, Shinzo Mammoto +2 more | 2005-05-10 |
| 6659121 | Solenoid and hydraulic control valve | Chishiro Yamashina | 2003-12-09 |
| 6648014 | Fluid control valve and plate with filter | Yoshihiro Mochizuki | 2003-11-18 |
| 6453773 | Elevation and index apparatus of water hydraulic driven type | Yoshihiro Mochizuki, Chishiro Yamashina, Shimpei Miyakawa, JPX Mammoto, Ryuji Kodama | 2002-09-24 |
| 6102786 | Polishing apparatus including turntable with polishing surface of different heights | Masayoshi Hirose, Yoshimi Sasaki, Akira Ogata, Seiji Ishikawa, Hirokuni Hiyama +1 more | 2000-08-15 |
| 5985090 | Polishing cloth and polishing apparatus having such polishing cloth | Ritsuo Kikuta, Fujio Aoyama, Koji Kato | 1999-11-16 |
| 5944042 | Flow force compensating method and flow control valve of spool type using the same method | Yuichi Usami | 1999-08-31 |
| 5888126 | Polishing apparatus including turntable with polishing surface of different heights | Masayoshi Hirose, Yoshimi Sasaki, Akira Ogata, Seiji Ishikawa, Hirokuni Hiyama +1 more | 1999-03-30 |
| 5882244 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada | 1999-03-16 |
| 5846335 | Method for cleaning workpiece | Toshiro Maekawa, Koji Ono, Motoaki Okada, Shiro Mishima, Masako Kodera +3 more | 1998-12-08 |
| 5830041 | Method and apparatus for determining endpoint during a polishing process | Fumihiko Sakata, Norio Kimura, Masako Kodera, Atsushi Shigeta | 1998-11-03 |
| 5785087 | Water hydraulic proportional control valve | Yuichi Usami | 1998-07-28 |
| 5704827 | Polishing apparatus including cloth cartridge connected to turntable | Toyomi Nishi, Manabu Tsujimura, Hiromi Yajima, Riichiro Aoki, Yukio Imoto +4 more | 1998-01-06 |
| 5679064 | Polishing apparatus including detachable cloth cartridge | Toyomi Nishi, Tetsuji Togawa | 1997-10-21 |
| 5672091 | Polishing apparatus having endpoint detection device | Tsutomu Takahashi, Keiichi Tohyama | 1997-09-30 |
| 5651725 | Apparatus and method for polishing workpiece | Ritsuo Kikuta, You Ishii | 1997-07-29 |
| 5639388 | Polishing endpoint detection method | Norio Kimura, Fumihiko Sakata | 1997-06-17 |