Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6042454 | System for detecting the endpoint of the polishing of a semiconductor wafer by a semiconductor wafer polisher | Katsuhide Watanabe, Akira Ogata | 2000-03-28 |
| 5830041 | Method and apparatus for determining endpoint during a polishing process | Tamami Takahashi, Norio Kimura, Masako Kodera, Atsushi Shigeta | 1998-11-03 |
| 5639388 | Polishing endpoint detection method | Norio Kimura, Tamami Takahashi | 1997-06-17 |