Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7697211 | Symmetrical objective having four lens groups for microlithography | David Shafer, Aurelian Dodoc, Johannes Zellner, Heiko Feldmann, Wilhelm Ulrich +3 more | 2010-04-13 |
| 7692868 | Lithography projection objective, and a method for correcting image defects of the same | Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer, Norbert Wabra | 2010-04-06 |
| 7570343 | Microlithographic projection exposure apparatus | Aurelian Dodoc, Karl-Heinz Schuster, Joerg Mallmann, Wilhelm Ulrich, Hans-Juergen Rostalski +6 more | 2009-08-04 |
| 7463423 | Lithography projection objective, and a method for correcting image defects of the same | Vladan Blahnik, Wilhelm Ulrich, Daniel Kraehmer, Norbert Wabra | 2008-12-09 |
| 7460206 | Projection objective for immersion lithography | Patrick Scheible, Alexander Hirnet, Alexandra Pazidis, Karl-Heinz Schuster, Christoph Zaczek +5 more | 2008-12-02 |