Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7405808 | Optical system, in particular illumination system, of a microlithographic projection exposure apparatus | Toralf Gruner, Damian Fiolka, Wilhelm Ulrich, Gerhard Fuerter | 2008-07-29 |
| 7321465 | Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses | Vladimir Kamenov, Toralf Gruner | 2008-01-22 |
| 7286284 | Microscope imaging system and method for emulating a high aperture imaging system, particularly for mask inspection | Heiko Feldmann, Toralf Gruner, Karl-Heinz Schuster, Joern Greif-Wuestenbecker, Thomas Scheruebl +3 more | 2007-10-23 |
| 7286245 | Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser | Ulrich Wegmann, Michael Hartl, Markus Mengel, Manfred Dahl, Helmut Haidner +1 more | 2007-10-23 |
| 7239450 | Method of determining lens materials for a projection exposure apparatus | Vladimir Kamenov, Daniel Kraehmer, Toralf Gruner, Aurelian Dodoc | 2007-07-03 |
| 7053988 | Optically polarizing retardation arrangement, and microlithography projection exposure machine | Birgit Enkisch, Karl-Heinz Schuster | 2006-05-30 |
| 6992834 | Objective with birefringent lenses | Vladimer Kamenov, Daniel Kraehmer, Wilhelm Ulrich | 2006-01-31 |