Issued Patents All Time
Showing 76–100 of 166 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823289 | Pump trouble diagnosing device for hydraulic drive device and display device of the diagnosing device | Hirotsugu Kasuya, Masami Ochiai | 2004-11-23 |
| 6728332 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Shinichi Hara, Hiroshi Maehara | 2004-04-27 |
| 6665371 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Hideyuki Chinju, Akira Miyake, Nobuaki Ogushi | 2003-12-16 |
| 6647086 | X-ray exposure apparatus | Mitsuaki Amemiya | 2003-11-11 |
| 6645707 | Device manufacturing method | Mitsuaki Amemiya, Shunichi Uzawa, Keiko Chiba | 2003-11-11 |
| 6603833 | X-ray exposure apparatus | Shigeru Terashima | 2003-08-05 |
| 6463119 | Exposure method, exposure apparatus and semiconductor manufacturing apparatus | Shigeru Terashima, Takeshi Miyachi, Kazuyuki Kasumi | 2002-10-08 |
| 6453001 | X-ray exposure apparatus | Mitsuaki Amemiya | 2002-09-17 |
| 6351512 | X-ray exposure apparatus | Shigeru Terashima | 2002-02-26 |
| 6324250 | Exposure method | Mitsuaki Amemiya, Shunichi Uzawa | 2001-11-27 |
| 6317479 | X-ray mask, and exposure method and apparatus using the same | Keiko Chiba, Masami Tsukamoto, Shinichi Hara, Hiroshi Maehara | 2001-11-13 |
| 6272202 | Exposure method and X-ray mask structure for use with the same | Keiko Chiba, Shunichi Uzawa, Mitsuaki Amemiya | 2001-08-07 |
| 6256371 | X-ray illumination device, x-ray illumination method, and an x-ray exposing device and device manufacturing method using the same | Takayuki Hasegawa | 2001-07-03 |
| 6219400 | X-ray optical system and X-ray exposure apparatus | Takayuki Hasegawa | 2001-04-17 |
| 6167111 | Exposure apparatus for synchrotron radiation lithography | Shunichi Uzawa, Yasuaki Fukuda, Nobutoshi Mizusawa, Shinichi Hara | 2000-12-26 |
| 6122598 | Measurement and display of load of excavating blasted ground | Yasuo Tanaka, Yoshinori Furuno, Takashi Yagyu, Yukihiko Sugiyama | 2000-09-19 |
| 6111246 | Semiconductor device testing apparatus having presence or absence detectors issuing an alarm when an error occurs | Hiroto Nakamura, Toshio Yabe, Michirou Chiba | 2000-08-29 |
| 6055851 | Apparatus for diagnosing failure of hydraulic pump for work machine | Yasuo Tanaka, Masami Ochiai, Takashi Yagyu, Akira Hashimoto, Yoshinori Furuno +1 more | 2000-05-02 |
| 5995886 | System for estimating residual service time of work vehicle | Yasuo Tanaka, Yoshinori Furuno, Takashi Yagyu, Yukihiko Sugiyama | 1999-11-30 |
| 5975709 | Reflecting system | Ryuichi Ebinuma | 1999-11-02 |
| 5949844 | Exposure apparatus | — | 1999-09-07 |
| 5934368 | Air-cooled electronic apparatus with condensation prevention | Tetsuya Tanaka, Toshio Hatada, Takayuki Atarashi, Junichi Kobayashi, Akihiro Takanashi +2 more | 1999-08-10 |
| 5923539 | Multilayer circuit substrate with circuit repairing function, and electronic circuit device | Kiyoshi Matsui, Ryohei Satoh, Michifumi Kawai, Masashi Ohkubo, Masakazu Yamamoto +3 more | 1999-07-13 |
| 5923719 | Exposure apparatus and device manufacturing method using the same | — | 1999-07-13 |
| 5892118 | Process for producing 4,6-diaminoresorcinols | Junji Kawachi, Hironori Matsubara, Yoshinori Nakahara | 1999-04-06 |