Issued Patents All Time
Showing 101–125 of 166 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5835560 | Exposure apparatus | Mitsuaki Amemiya, Kazuyuki Kasumi | 1998-11-10 |
| 5825844 | Optical arrangement and illumination method | Akira Miyake | 1998-10-20 |
| 5790630 | Radiation window and radiation system using the same | Shigeru Terashima | 1998-08-04 |
| 5761486 | Method and apparatus for simulating a computer network system through collected data from the network | Yasuaki Muraki, Takashi Nakagawa | 1998-06-02 |
| 5740355 | Transaction tracing apparatus | Yasuaki Muraki, Takashi Nakagawa | 1998-04-14 |
| 5657113 | Document exposure apparatus | Katsuhiko Ono, Tsuyoshi Seto | 1997-08-12 |
| 5641593 | Lithographic mask and exposure apparatus using the same | Masami Hayashida | 1997-06-24 |
| 5623529 | SOR exposure system and mask manufactured thereby | Ryuichi Ebinuma | 1997-04-22 |
| 5606586 | X-ray exposure method and apparatus and device manufacturing method | Mitsuaki Amemiya, Yasuaki Fukuda, Akira Miyake | 1997-02-25 |
| 5604779 | Optical exposure method and device formed by the method | Mitsuaki Amemiya | 1997-02-18 |
| 5598712 | Latent heat accumulation system | Takayuki Hachimonji, Katsuya Yamashita, Sanae Sekita, Tsuyoshi Noma | 1997-02-04 |
| 5572563 | Mirror unit and an exposure apparatus using the unit | Kazuyuki Kasumi | 1996-11-05 |
| 5549994 | Exposure apparatus and reflection type mask to be used in the same | Masami Hayashida | 1996-08-27 |
| 5519321 | Circularly polarizing local antenna arrangement with a movable antenna | Juergen Hagen | 1996-05-21 |
| 5503950 | Reflection type mask and manufacture of microdevices using the same | Akira Miyake | 1996-04-02 |
| 5494539 | Metal member quality improving method by spot welding | Hiroshi Tsujimura, Yasumasa Tamai, Masayuki Kurihara, Seiichi Toyoda, Koichi Kurosawa | 1996-02-27 |
| 5481882 | Latent heat accumulation system | Takayuki Hachimonji, Katsuya Yamashita, Sanae Sekita, Tsuyoshi Noma | 1996-01-09 |
| 5467017 | Antenna arrangement for a nuclear magnetic resonance apparatus | Wilhelm Duerr, Norihiko Mikoshiba | 1995-11-14 |
| 5461657 | X-ray mirror, and x-ray exposure apparatus and device manufacturing method employing the same | Masami Hayashida | 1995-10-24 |
| 5444753 | X-ray lithography mask, light exposure apparatus and process therefore | Masami Hayashida | 1995-08-22 |
| 5433988 | Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray | Yasuaki Fukuda, Shigetaro Ogura, Takashi Iizuka | 1995-07-18 |
| 5394451 | Optical arrangement for exposure apparatus | Akira Miyake | 1995-02-28 |
| 5335259 | X-ray exposure apparatus | Masami Hayashida, Yasuaki Fukuda | 1994-08-02 |
| 5310603 | Multi-layer reflection mirror for soft X-ray to vacuum ultraviolet ray | Yasuaki Fukuda, Shigetaro Ogura, Takashi Iizuka | 1994-05-10 |
| 5292913 | Myoinositol derivatives and preparation process thereof | Shoichiro Ozaki, Akira Awaya, Yusaku Ishizuka | 1994-03-08 |