Issued Patents All Time
Showing 26–50 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534242 | Multiple exposure device formation | Mitsuro Sugita, Akiyoshi Suzuki, Miyoko Kawashima, Yuichi Iwasaki | 2003-03-18 |
| 6403291 | Multiple exposure method | Miyoko Kawashima, Akiyoshi Suzuki | 2002-06-11 |
| 6221541 | Device manufacturing method and apparatus utilizing concentric fan-shaped pattern mask | Makoto Ogusu | 2001-04-24 |
| 6157452 | Position detecting apparatus | Masanobu Hasegawa | 2000-12-05 |
| 6154281 | Position detecting system and device manufacturing method using the same | Koichi Sentoku | 2000-11-28 |
| 6083650 | Device manufacturing method utilizing concentric fan-shaped pattern mask | Makoto Ogusu | 2000-07-04 |
| 6060739 | Non-volatile semiconductor memory device having a floating gate inside a grove | — | 2000-05-09 |
| 5985720 | Method of making non-volatile semiconductor memory device with the floating gate having upper and lower impurity concentrations | — | 1999-11-16 |
| 5946593 | Semiconductor device manufacturing method | — | 1999-08-31 |
| 5891773 | Non-volatile semiconductor storage apparatus and production thereof | — | 1999-04-06 |
| 5846861 | Method of manufacturing non-volatile semiconductor memory having erasing gate | — | 1998-12-08 |
| 5825690 | Semiconductor non-volatile storage device having verification potential applying device for re-writing to insufficiently written memory cells | — | 1998-10-20 |
| 5822389 | Alignment apparatus and SOR X-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1998-10-13 |
| 5751426 | Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object | Noriyuki Nose, Minoru Yoshii, Hiroshi Osawa, Koichi Sentoku, Toshihiko Tsuji +1 more | 1998-05-12 |
| 5721721 | Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium | Yoshihiro Yanagisawa, Yuko Morikawa, Hiroshi Matsuda, Haruki Kawada, Kunihiro Sakai +7 more | 1998-02-24 |
| 5717492 | Position detecting apparatus and a method for manufacturing semiconductor devices using the apparatus | Koichi Sentoku, Hiroshi Osawa, Masanobu Hasegawa | 1998-02-10 |
| 5682239 | Apparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emitters | Takahiro Matsumoto, Koichi Sentoku | 1997-10-28 |
| 5670809 | Non-volatile semiconductor memory device | — | 1997-09-23 |
| 5625453 | System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating | Takahiro Matsumoto, Yoshiaki Ohtsu, Koichi Sentoku | 1997-04-29 |
| 5610718 | Apparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizes | Koichi Sentoku, Takahiro Matsumoto, Noriyuki Nose, Minoru Yoshii | 1997-03-11 |
| 5585923 | Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means | Noriyuki Nose, Takeshi Miyachi, Koichi Sentoku, Takahiro Matsumoto | 1996-12-17 |
| 5550635 | Rotational deviation detecting method and system using a periodic pattern | Koichi Sentoku, Takahiro Matsumoto | 1996-08-27 |
| 5523976 | Non-volatile semiconductor memory device having a memory cell group operative as a redundant memory cell group for replacement of another group | Takeshi Okazawa | 1996-06-04 |
| 5524131 | Alignment apparatus and SOR x-ray exposure apparatus having same | Shunichi Uzawa, Takao Kariya, Makoto Higomura, Nobutoshi Mizusawa, Ryuichi Ebinuma +5 more | 1996-06-04 |
| 5519686 | Encoder for controlling measurements in the range of a few angstroms | Yoshihiro Yanagisawa, Yuko Morikawa, Hiroshi Matsuda, Haruki Kawada, Kunihiro Sakai +7 more | 1996-05-21 |