Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5625453 | System and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction grating | Takahiro Matsumoto, Kenji Saitoh, Koichi Sentoku | 1997-04-29 |