Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5502669 | Electrically erasable and programmable read only memory device having selectively erasable sectors | — | 1996-03-26 |
| 5483343 | Wavelength compensator in a helium ambience | Kazunori Iwamoto, Hiroshi Osawa | 1996-01-09 |
| 5481363 | Positional deviation detecting method | Masakazu Matsugu, Jun Hattori, Sakae Houryu | 1996-01-02 |
| 5455679 | Position detecting system | Sakae Houryu | 1995-10-03 |
| 5396335 | Position detecting method | Masanobu Hasegawa, Shigeyuki Suda | 1995-03-07 |
| 5377009 | Alignment method | Atsushi Kitaoka | 1994-12-27 |
| 5369486 | Position detector for detecting the position of an object using a diffraction grating positioned at an angle | Takahiro Matsumoto, Noriyuki Nose, Minoru Yoshii, Masanobu Hasegawa, Koichi Sentoku | 1994-11-29 |
| 5343291 | Method and apparatus for measuring an interval between two objects | Mitsutoshi Ohwada, Masakazu Matsugu, Shigeyuki Suda, Minoru Yoshii, Yukichi Niwa +2 more | 1994-08-30 |
| 5333050 | Measuring method and apparatus for meausring the positional relationship of first and second gratings | Noriyuki Nose, Koichi Sentoku, Minoru Yoshii | 1994-07-26 |
| 5332692 | Method of manufacturing a semiconductor device having a polycide structure | — | 1994-07-26 |
| 5327221 | Device for detecting positional relationship between two objects | Masakazu Matsugu, Shigeyuki Suda, Yukichi Niwa, Ryo Kuroda, Noriyuki Nose +3 more | 1994-07-05 |
| 5325176 | Position detecting method and apparatus including Fraunhofer diffraction detector | Shigeyuki Suda, Masakazu Matsugu, Naoto Abe, Minoru Yoshii, Ryo Kuroda | 1994-06-28 |
| 5319444 | Position detecting method and apparatus | Masakazu Matsugu, Yukichi Niwa, Noriyuki Nose, Minoru Yoshii, Shigeyuki Suda | 1994-06-07 |
| 5313272 | Method and apparatus for measuring deviation between patterns on a semiconductor wafer | Noriyuki Nose, Hiroshi Osawa, Masanobu Hasegawa | 1994-05-17 |
| 5294980 | Positioning detecting method and apparatus | Masakazu Matsugu, Yukichi Niwa, Noriyuki Nose, Ryo Kuroda, Shigeyuki Suda | 1994-03-15 |
| 5285259 | Position detecting method | — | 1994-02-08 |
| 5235408 | Position detecting method and apparatus | Masakazu Matsugu, Shigeyuki Suda | 1993-08-10 |
| 5229617 | Position detecting method having reflectively scattered light prevented from impinging on a detector | Masakazu Matsugu | 1993-07-20 |
| 5200800 | Position detecting method and apparatus | Shigeyuki Suda, Minoru Yoshii, Noriyuki Nose | 1993-04-06 |
| 5196711 | Deviation measuring device including a mask having a grating pattern and a zone plate pattern | Masakazu Matsugu | 1993-03-23 |
| 5162656 | Position detecting device employing marks and oblique projection | Masakazu Matsugu, Shigeyuki Suda, Ryo Kuroda, Yukichi Niwa, Noriyuki Nose | 1992-11-10 |
| 5160848 | Device for detecting the relative position between opposed first and second objects | Masakazu Matsugu, Naoto Abe | 1992-11-03 |
| 5148036 | Multi-axis wafer position detecting system using a mark having optical power | Masakazu Matsugu | 1992-09-15 |
| 5114236 | Position detection method and apparatus | Masakazu Matsugu, Mitsutoshi Ohwada | 1992-05-19 |
| 4896204 | Semiconductor device and method of manufacturing thereof | Yoshihiro Hirata, Reiji Tamaki, Takeshi Noguchi, Junichi Arima, Shigeru Harada | 1990-01-23 |