| 8610089 |
Thermal conditioning system for thermal conditioning a part of a lithographic apparatus and a thermal conditioning method |
Sjoerd Nicolaas Lambertus Donders, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors, Olav Waldemar Vladimir Frijns, Gerrit Van Donk +1 more |
2013-12-17 |
| 8508711 |
Lithographic apparatus and device manufacturing method |
Arjan Hubrecht Josef Anna Martens, Pieter Jacob Kramer, Hubertus Leonardus Franciscus Heusschen |
2013-08-13 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +12 more |
2013-05-21 |
| 8246838 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2012-08-21 |
| 8107053 |
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Franciscus Johannes Herman Maria Teunissen, Jurgen Benischek |
2012-01-31 |
| 8045137 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2011-10-25 |
| 8031325 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2011-10-04 |
| 8018573 |
Lithographic apparatus and device manufacturing method |
Marco Koert Stavenga, Johannes Henricus Wilhelmus Jacobs, Hans Jansen |
2011-09-13 |
| 8004652 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2011-08-23 |
| 7914687 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2011-03-29 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7751027 |
Lithographic apparatus and device manufacturing method |
Johannes Henricus Wilhelmus Jacobs, Igor Petrus Maria Bouchoms, Nicolaas Ten Kate, Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders +6 more |
2010-07-06 |
| 7733459 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2010-06-08 |
| 7701550 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more |
2010-04-20 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam +12 more |
2009-10-13 |
| 7428038 |
Lithographic apparatus, device manufacturing method and apparatus for de-gassing a liquid |
Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Franciscus Johannes Herman Maria Teunissen, Jurgen Benischek |
2008-09-23 |
| 7397533 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2008-07-08 |
| 7379155 |
Lithographic apparatus and device manufacturing method |
Jeroen Johannes Sophia Maria Mertens, Sjoerd Nicolaas Lambertus Donders, Roelof Frederick De Graaf, Christiaan Alexander Hoogendam, Antonius Johannus Van Der Net +4 more |
2008-05-27 |
| 7378669 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby |
— |
2008-05-27 |
| 7378025 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay |
2008-05-27 |
| 7271873 |
Lithographic apparatus and device manufacturing method |
Nicolas Lallemant, Marcel Beckers, Ronald Stultiens, Pascal Antonius Smits, Wladimir Fransiscus Hertog +3 more |
2007-09-18 |
| 7072021 |
Lithographic apparatus and device manufacturing method |
Nicolas Lallemant, Marcel Beckers, Ronald Stultiens, Pascal Antonius Smits, Wladimir Franciscus Gerardus Maria Hertog +3 more |
2006-07-04 |