Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9535342 | Metrology method and apparatus, and device manufacturing method | Patrick Warnaar | 2017-01-03 |
| 9535338 | Metrology method and apparatus, substrate, lithographic system and device manufacturing method | Martin Jacobus Johan Jak, Armand Eugene Albert Koolen | 2017-01-03 |
| 9331022 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Patrick Warnaar, Kaustuve Bhattacharyya, Michael Kubis | 2016-05-03 |
| 9255892 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-02-09 |
| 9235141 | Inspection apparatus and method for measuring a property of a substrate | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Everhardus Cornelis Mos, Andreas Fuchs, Martyn John Coogans | 2016-01-12 |
| 9229338 | Substrate, a method of measuring a property, an inspection apparatus and a lithographic apparatus | Marcus Adrianus Van De Kerkhof, Maurits Van Der Schaar | 2016-01-05 |
| 9140998 | Metrology method and inspection apparatus, lithographic system and device manufacturing method | Arno Jan Bleeker, Patrick Warnaar, Willem Marie Julia Marcel Coene, Michael Kubis | 2015-09-22 |
| 9134256 | Metrology method and apparatus, lithographic system and device manufacturing method | Omer Abubaker Omer Adam | 2015-09-15 |
| 9081304 | Substrate, an inspection apparatus, and a lithographic apparatus | Willem Marie Julia Marcel Coene | 2015-07-14 |
| 9081303 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Adrianus Johannes Hendrikus Schellekens, Michael Kubis | 2015-07-14 |
| 8994944 | Methods and scatterometers, lithographic systems, and lithographic processing cells | Hugo Augustinus Joseph Cramer, Arie Jeffrey Den Boef, Henricus Johannes Lambertus Megens, Adrianus Johannes Hendrikus Schellekens, Michael Kubis | 2015-03-31 |
| 8867020 | Metrology method and apparatus, and device manufacturing method | Patrick Warnaar | 2014-10-21 |
| 8709687 | Substrate and patterning device for use in metrology, metrology method and device manufacturing method | Maurits Van Der Schaar, Patrick Warnaar, Kaustuve Bhattacharyya, Michael Kubis | 2014-04-29 |
| 8411287 | Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate | Arno Jan Bleeker, Arie Jeffrey Den Boef, Armand Eugene Albert Koolen, Henricus Petrus Maria Pellemans, Reinder Teun Plug +1 more | 2013-04-02 |
| 8223347 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Willem Marie Julia Marcel Coene | 2012-07-17 |