Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9878516 | Metamaterial thin films | Orest J. Glembocki, Sharka M. Prokes, Joshua D. Caldwell, Markku Leskelä, Jaakko Niinisto +3 more | 2018-01-30 |
| 9828674 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2017-11-28 |
| 9783563 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2017-10-10 |
| 9765431 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Hamalainen, Jani Holopainen, Timo Hatanpää, Markku Leskelä | 2017-09-19 |
| 9677173 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Markku Leskelä, Suvi Haukka | 2017-06-13 |
| 9646820 | Methods for forming conductive titanium oxide thin films | Viljami Pore, Markku Leskelä | 2017-05-09 |
| 9394609 | Atomic layer deposition of aluminum fluoride thin films | Miia Mäntymäki, Markku Leskelä | 2016-07-19 |
| 9382615 | Vapor deposition of LiF thin films | Miia Mäntymäki, Jani Hamalainen, Markku Leskelä | 2016-07-05 |
| 9365926 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Markku Leskelä, Suvi Haukka | 2016-06-14 |
| 9315894 | Atomic layer deposition of metal phosphates and lithium silicates | Jani Hamalainen, Jani Holopainen, Timo Hatanpää, Markku Leskelä | 2016-04-19 |
| 9315896 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2016-04-19 |
| 9223203 | Microcontact printed films as an activation layer for selective atomic layer deposition | Elina Färm, Seppo Lindroos, Markku Leskelä | 2015-12-29 |
| 9175390 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2015-11-03 |
| 9169557 | Process for producing oxide films | Timo Hatanpää, Marko Vehkamaki, Markku Leskelä | 2015-10-27 |
| 8945675 | Methods for forming conductive titanium oxide thin films | Viljami Pore, Markku Leskelä | 2015-02-03 |
| 8685165 | Metal oxide films | Antti Rahtu, Raija H. Matero, Markku Leskelä, Timo Hatanpää, Timo Hanninen +1 more | 2014-04-01 |
| 8372483 | Methods for forming thin films comprising tellurium | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2013-02-12 |
| 7713584 | Process for producing oxide films | Timo Hatanpää, Marko Vehkamaki, Markku Leskelä | 2010-05-11 |
| 7618681 | Process for producing bismuth-containing oxide films | Marko Vehkamaki, Timo Hatanpää, Markku Leskelä | 2009-11-17 |
| 7498272 | Method of depositing rare earth oxide thin films | Jaakko Niinisto, Matti Putkonen, Petri Raisanen, Antti Niskanen, Markku Leskelä | 2009-03-03 |
| 7377976 | Method for growing thin oxide films | Antti Rahtu, Markku Leskelä, Kaupo Kukli | 2008-05-27 |
| 7220451 | Process for producing metal thin films by ALD | Titta Aaltonen, Petra Alén, Markku Leskelä | 2007-05-22 |
| 7108747 | Method for growing oxide thin films containing barium and strontium | Markku Leskelä, Timo Hatanpää, Timo Hanninen, Marko Vehkamaki | 2006-09-19 |
| 6932867 | Method for growing thin oxide films | Antti Rahtu, Markku Leskelä, Kaupo Kukli | 2005-08-23 |
| 6858546 | Method of depositing rare earth oxide thin films | Jaakko Niinisto, Matti Putkonen, Petri Raisanen, Antti Niskanen, Markku Leskelä | 2005-02-22 |