Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7220451 | Process for producing metal thin films by ALD | Titta Aaltonen, Mikko Ritala, Markku Leskelä | 2007-05-22 |
| 6824816 | Process for producing metal thin films by ALD | Titta Aaltonen, Mikko Ritala, Markku Leskelä | 2004-11-30 |
| 6706115 | Method for preparing metal nitride thin films | Markku Leskelä, Mikko Ritala, Marika Juppo | 2004-03-16 |