Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE48853 | Formation of a lithium comprising structure on a substrate by ALD | Ola Nilsen, Helmer Fjellvag, Mari Endresen Alnes, Matti Putkonen | 2021-12-14 |
| RE47325 | Formation of a lithium comprising structure on a substrate by ALD | Ola Nilsen, Helmer Fjellvag, Mari Endresen Alnes, Matti Putkonen | 2019-03-26 |
| RE46610 | Formation of a lithium comprising structure on a substrate by ALD | Ola Nilsen, Helmer Fjellvag, Mari Endresen Alnes, Matti Putkonen | 2017-11-14 |
| 8894723 | Formation of a lithium comprising structure on a substrate by ALD | Ola Nilsen, Helmer Fjellvag, Mari Endresen Alnes, Matti Putkonen | 2014-11-25 |
| 7220451 | Process for producing metal thin films by ALD | Petra Alén, Mikko Ritala, Markku Leskelä | 2007-05-22 |
| 6824816 | Process for producing metal thin films by ALD | Petra Alén, Mikko Ritala, Markku Leskelä | 2004-11-30 |