Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9909211 | Vapor deposition of LiF thin films | Jani Hamalainen, Mikko Ritala, Markku Leskelä | 2018-03-06 |
| 9394609 | Atomic layer deposition of aluminum fluoride thin films | Mikko Ritala, Markku Leskelä | 2016-07-19 |
| 9382615 | Vapor deposition of LiF thin films | Jani Hamalainen, Mikko Ritala, Markku Leskelä | 2016-07-05 |