Issued Patents All Time
Showing 76–79 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824816 | Process for producing metal thin films by ALD | Titta Aaltonen, Petra Alén, Markku Leskelä | 2004-11-30 |
| 6706115 | Method for preparing metal nitride thin films | Markku Leskelä, Petra Alén, Marika Juppo | 2004-03-16 |
| 6632279 | Method for growing thin oxide films | Antti Rahtu, Markku Leskelä, Kaupo Kukli | 2003-10-14 |
| 6416577 | Method for coating inner surfaces of equipment | Tuomo Suntoloa, Markku Leskelä | 2002-07-09 |