Issued Patents All Time
Showing 26–50 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492703 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material | Katja Väyrynen, Timo Hatanpää, Anton Vihervaara, Markku Leskelä | 2022-11-08 |
| 11410851 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Markku Leskelä | 2022-08-09 |
| 11390946 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process | Timo Hatanpää, Katja Väyrynen, Markku Leskelä | 2022-07-19 |
| 11244825 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Miika Mattinen, Markku Leskelä | 2022-02-08 |
| 11155917 | Atomic layer deposition of rhenium containing thin films | Jani Hamalainen, Markku Leskelä | 2021-10-26 |
| 11072622 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2021-07-27 |
| 11047046 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Timo Hatanpää, Markku Leskelä | 2021-06-29 |
| 11047042 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Tiina McKee, Timo Hatanpää, Markku Leskelä | 2021-06-29 |
| 11014866 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Miika Mattinen, Markku Leskelä | 2021-05-25 |
| 10941487 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2021-03-09 |
| 10847366 | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process | Miika Mattinen, Markku Leskelä | 2020-11-24 |
| 10741403 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Markku Leskelä | 2020-08-11 |
| 10731249 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Timo Hatanpää, Katja Väyrynen, Markku Leskelä | 2020-08-04 |
| 10734223 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Miika Mattinen, Markku Leskelä | 2020-08-04 |
| 10619244 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2020-04-14 |
| 10619242 | Atomic layer deposition of rhenium containing thin films | Jani Hamalainen, Markku Leskelä | 2020-04-14 |
| 10468261 | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures | Katja Väyrynen, Markku Leskelä | 2019-11-05 |
| 10468262 | Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures | Katja Väyrynen, Markku Leskelä | 2019-11-05 |
| 10358407 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Timo Hatanpää, Miika Mattinen, Markku Leskelä | 2019-07-23 |
| 10344378 | Precursors and methods for atomic layer deposition of transition metal oxides | Timo Hatanpää, Jaakko Niinisto, Markku Leskelä, Suvi Haukka | 2019-07-09 |
| 10319588 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Miika Mattinen, Markku Leskelä | 2019-06-11 |
| 10308673 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2019-06-04 |
| 10208379 | Synthesis and use of precursors for ALD of group VA element containing thin films | Viljami Pore, Timo Hatanpää, Markku Leskelä | 2019-02-19 |
| 10145009 | Vapor deposition of thin films comprising gold | Maarit Mäkelä, Timo Hatanpää, Markku Leskelä | 2018-12-04 |
| 9909211 | Vapor deposition of LiF thin films | Miia Mäntymäki, Jani Hamalainen, Markku Leskelä | 2018-03-06 |