Issued Patents All Time
Showing 26–50 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7207766 | Load lock chamber for large area substrate processing system | Shinichi Kurita, Yoshiaki Tanase | 2007-04-24 |
| 7129694 | Large substrate test system | Matthias Brunner, Shinichi Kurita, Edgar Kehrberg | 2006-10-31 |
| 7105463 | Load lock chamber having two dual slot regions | Shinichi Kurita | 2006-09-12 |
| 7086638 | Methods and apparatus for sealing an opening of a processing chamber | Shinichi Kurita, Ke Ling Lee | 2006-08-08 |
| 7083702 | RF current return path for a large area substrate plasma reactor | Ernst Keller, Carl A. Sorensen | 2006-08-01 |
| 7075323 | Large substrate test system | Matthias Brunner, Shinichi Kurita, Edgar Kehrberg | 2006-07-11 |
| 7031600 | Method and apparatus for silicon oxide deposition on large area substrates | Sanjay Yadav, Quanyuan Shang | 2006-04-18 |
| 7018517 | Transfer chamber for vacuum processing system | Shinichi Kurita, Emanuel Beer, Hung T. Nguyen | 2006-03-28 |
| 7017269 | Suspended gas distribution plate | John M. White, Ernst Keller | 2006-03-28 |
| 7007919 | Slit valve method and apparatus | Emanuel Beer, Dongchoon Suh, Jaime Munoz, Sam Kim | 2006-03-07 |
| 6949143 | Dual substrate loadlock process equipment | Shinichi Kurita, Akihiro Hosokawa | 2005-09-27 |
| 6916147 | Substrate storage cassette with substrate alignment feature | Dongchoon Suh, Rolf Guenther | 2005-07-12 |
| 6896513 | Large area substrate processing system | Robert Z. Bachrach | 2005-05-24 |
| 6881276 | Detecting the endpoint of a chamber cleaning | James T. Gardner | 2005-04-19 |
| 6824343 | Substrate support | Shinichi Kurita, Suhail Anwar, Toshio Kiyotake, Hung T. Nguyen | 2004-11-30 |
| 6823589 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Ernst Keller | 2004-11-30 |
| 6746198 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more | 2004-06-08 |
| 6719851 | Lid assembly for opening a process chamber lid and uses therefor | Shinichi Kurita | 2004-04-13 |
| 6679671 | Substrate transfer shuttle having a magnetic drive | John M. White | 2004-01-20 |
| 6585828 | Process chamber lid service system | Shinichi Kurita | 2003-07-01 |
| 6552297 | RF matching network with distributed outputs | Carl A. Sorensen | 2003-04-22 |
| 6534007 | Method and apparatus for detecting the endpoint of a chamber cleaning | James T. Gardner | 2003-03-18 |
| 6517303 | Substrate transfer shuttle | John M. White, Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita +1 more | 2003-02-11 |
| 6477980 | Flexibly suspended gas distribution manifold for plasma chamber | John M. White, Ernst Keller | 2002-11-12 |
| 6471459 | Substrate transfer shuttle having a magnetic drive | John M. White | 2002-10-29 |